Daihen RMN-20E2-V射频匹配器 PDF资料
1.产 品 资 料 介 绍：
Daihen RMN-20E2-V 射频匹配器
- 适配 20kW 功率射频电源，标准 13.56MHz 频段
- 高速自动调谐，快速抵消等离子阻抗波动
- 大幅降低反射功率，保护射频主机不损坏
- 内置高精度电容电感调节模组，匹配精度高
- 金属密封腔体，适配无尘车间洁净工况
- 自带水冷散热结构，高负载持续工作不升温
- 数字通讯接口，可与机台主控实时联动
- 实时采集驻波数据，异常快速报警提示
- 过温、过流、驻波过高多重安全防护
- 铜制射频通路，功率传输损耗更低
- 工艺参数断电记忆，重启无需重新标定
- 标准化对接端口，拆装替换简单省时
- 抗电磁干扰设计，多射频设备同柜稳定运行
- 紧凑一体化结构，节省机柜安装空间
- 原厂原装程序，匹配曲线适配半导体等离子工艺结尾：Daihen RMN-20E2-V 匹配响应快、功率传输稳定，是薄膜、刻蚀设备核心射频备件。
Daihen RMN-20E2-V RF Matcher
Introduction: Daihen RMN-20E2-V semiconductor specific automatic RF matching device, suitable for etching and coating machines, responsible for automatic adjustment of RF impedance.
Suitable for 20kW power RF power supply, standard 13.56MHz frequency band
High speed automatic tuning, quickly offsetting plasma impedance fluctuations
Significantly reduce reflected power to protect the RF host from damage
Built in high-precision capacitor and inductor adjustment module, with high matching accuracy
Metal sealed chamber, suitable for clean working conditions in dust-free workshops
Equipped with a water-cooling heat dissipation structure, it can work continuously under high loads without heating up
Digital communication interface, capable of real-time linkage with the machine master control
Real time collection of standing wave data, rapid alarm prompt for abnormalities
Multiple safety protections against overheating, overcurrent, and high standing waves
Copper RF channel with lower power transmission loss
Process parameter power-off memory, restart without recalibration
Standardized docking port, easy disassembly and replacement, time-saving
Anti electromagnetic interference design, stable operation of multiple RF devices in the same cabinet
Compact integrated structure, saving cabinet installation space
Original factory program, matching curve to adapt semiconductor plasma process
Conclusion: Daihen RMN-20E2-V has fast matching response and stable power transmission, making it a core RF spare part for thin film and etching equipment.
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| PMB32E-20114-00 | 70 BV 01b-E | PWM3632-5313-7-3 |
| PMB32D-10100-00 | AMAT 0100-01341 | P21NSXD-LNN-NS-02 |
| PMB32D-00201-00 | AMAT 0110-02336 | P22NRXA-LDN-NS-00 |
| PMB32D-00200-03 | IMBLK01 | 546152 Terminal Block, PKB 20 |
| PMB32D-00200-02 | 07BR60R1 | N32HLLJ-LNK-NS-01 |
| PMB32D-00200-01 | 07NG60R1 | M21NRXA-LNN-NS-00 |
| PMB32D-00200-00 | 07ZB69R2 | N31HRHJ-LKN-NS-01 |
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