AMAT 0010-08581发电机输入/输出块 PDF资料
1.产 品 资 料 介 绍：
AMAT 0010-08581 发电机输入 / 输出块
- 搭载 DeviceNet 总线接口，实现射频电源与整机主控通讯
- 多路数字 DI/DO 通道，采集互锁、阀门、安全回路开关信号
- 四路模拟 AO/AI，传输功率、电压、射频匹配模拟参数
- 专用 GPI 射频发生器接口，直连射频电源传输控制指令
- 两路互锁专用接口，保障腔体安全联锁停机逻辑
- 板载信号光耦隔离，抵御射频强电磁干扰，信号无杂波
- 可调 DeviceNet 地址与波特率，组网配置灵活便捷
- 电源端子支持 + 15V、+24V 机台标准供电输入
- 面板 MOD、NET 状态灯，快速判断总线与通道故障
- 金属密闭外壳，防尘抗震适配洁净半导体车间
- 集成过流、短路、浪涌保护，异常自动切断输出报警
- 端子分区排布，数字、模拟、总线接口区分清晰易接线
- 壁挂式固定支架，射频机柜内部安装稳固
- 实时上传射频功率、腔体互锁状态至上位控制系统
- 原厂配套 Endura/Centura 平台，同型号可直接替换备件结尾：AMAT 0010-08581 射频信号采集传输稳定，是半导体设备射频发生器配套核心 I/O 备件。
AMAT 0010-08581 Generator Input/Output Block
Introduction: Application material DeviceNet RF power supply rack I/O module, compatible with 300mm semiconductor coating etching equipment RF generator signal conversion.
Equipped with DeviceNet bus interface, realizing communication between RF power supply and the main control of the whole machine
Multiple digital DI/DO channels, collecting interlock, valve, and safety circuit switch signals
Four channel analog AO/AI, transmission power, voltage, RF matching simulation parameters
Dedicated GPI RF generator interface, directly connected to RF power supply for transmitting control commands
Two dedicated interlocking interfaces ensure the safety of the cavity and interlock the shutdown logic
Onboard signal optocoupler isolation, resistant to strong electromagnetic interference from radio frequency, signal free from clutter
Adjustable DeviceNet address and baud rate, flexible and convenient networking configuration
The power terminal supports+15V and+24V machine standard power input
Panel MOD and NET status lights, quickly identify bus and channel faults
Metal enclosed shell, dust-proof and earthquake resistant, suitable for clean semiconductor workshops
Integrated overcurrent, short circuit, surge protection, automatic cut-off of abnormal output alarm
Terminal partition layout, clear differentiation of digital, analog, and bus interfaces for easy wiring
Wall mounted fixed bracket, firmly installed inside the RF cabinet
Real time uploading of RF power and cavity interlock status to the upper control system
Original factory equipped Endura/Ventura platform, the same model can be directly replaced with spare parts
Conclusion: AMAT 0010-08581 has stable RF signal acquisition and transmission, and is a core I/O spare part for semiconductor equipment RF generators.
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| PMB33C-20214-03 | IMMPI01 | N31HRFL-LNK-NS-00 |
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| PMB33C-20214-01 | 07PS63R2 | PFCL201 20.0KN |
| PMB33C-20214-00 | 07AA61R1 | 1SAP250100R0001 |
| PMB33C-20201-03 | IMASI02 | N32HLLK-LNK-NS-01 |
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