Novellus 02-351553-0数字动态控制器 PDF资料
1.产 品 资 料 介 绍：
Novellus 02-351553-0数字动态控制器是泛林半导体为其半导体沉积与刻蚀设备配套的专用运动控制板卡，主要用于精确控制晶圆平台及机械臂的多轴联动。
产品特点
专为Novellus CVD/PVD沉积设备配套设计。
实现闭环高速动态调整，实时修正晶圆平台运行偏差。
高频信号采样，可捕捉细微位移与振动变化。
内置电磁隔离滤波器，抗车间射频干扰。
支持多通道编码器反馈接口，精确采集轴位置数据。
集成过流、过速、过热等多重安全保护。
通过专用总线与整机主控对接，同步工艺动作时序。
采用洁净级工业电路板，低释气性适用于洁净车间。
模块化插卡式设计，便于机柜拆卸与更换。
内置故障自诊断代码，快速定位运动异常。
适应晶圆平台与机械臂的多轴联动控制。
优化散热回路，支持24小时连续满载运行。
动态工艺参数断电不丢失数据。
出厂经整机匹配校准，现场调试步骤简便。
板卡尺寸紧凑，节省控制柜安装空间。
结尾
综上所述，Novellus 02-351553-0数字动态控制器具有精确的动态调整与稳定运行能力，是Novellus半导体沉积设备的专用运动控制板卡。
Novellus 02-351553-0数字动态控制器 英文介绍
The Novellus 02-351553-0 digital dynamic controller is a dedicated motion control board provided by Panlin Semiconductor for its semiconductor deposition and etching equipment. It is mainly used for precise control of the multi axis linkage of wafer platforms and robotic arms.
Product Features
Specially designed to complement Novellus CVD/PVD deposition equipment.
Realize closed-loop high-speed dynamic adjustment and real-time correction of wafer platform operation deviation.
High frequency signal sampling can capture subtle displacement and vibration changes.
Built in electromagnetic isolation filter, resistant to workshop RF interference.
Support multi-channel encoder feedback interface to accurately collect axis position data.
Integrated multiple safety protections such as overcurrent, overspeed, and overheating.
Connect with the main control of the whole machine through a dedicated bus to synchronize the timing of process actions.
Adopting clean grade industrial circuit boards with low gas release, suitable for clean workshops.
Modular plug-in card design, convenient for cabinet disassembly and replacement.
Built in fault self diagnostic code, quickly locate abnormal movement.
Adapt to multi axis linkage control between wafer platform and robotic arm.
Optimize the heat dissipation circuit and support 24-hour continuous full load operation.
Dynamic process parameters can be powered off without losing data.
The whole machine is matched and calibrated before leaving the factory, and the on-site debugging steps are simple.
The board size is compact, saving installation space for the control cabinet.
ending
In summary, the Novellus 02-351553-0 digital dynamic controller has precise dynamic adjustment and stable operation capabilities, and is a dedicated motion control board for Novellus semiconductor deposition equipment.
Novellus 02-351553-0数字动态控制器 产品展示
3.其他产品
IS200TTURH1CFD IS230TNTRHIC扩展接口板
DEIF LSU-113DG电压调节器
WOODWARD 8446-1019数字调速器
PROSOFT MVI56E-MCM communication module
EMERSON SLS1508 Relay Module
PROSOFT MVI56E-MNETCR communication module
| PMB33F-20116-00 | 6SC6500-0UC00 | CI615 3BHT300024R1 |
| PMB33F-20101-03 | DSSS170 48970001-A | 6DD2920-0AP0 |
| PMB33F-20101-00 | Gespac GESMFI-1 9119 | TC520 3BSE001449R1 |
| PMB33F-20100-03 | HONEYWELL CC-TDOB01 | 086348-001 |
| PMB33F-20100-02 | DSTA180 57120001-ET | DSQC406 |
| PMB33F-20100-01 | DSQC663 3HAC029818-001/14 | UA C326 AE01 HIEE401481R0001 |
| PMB33F-20100-00 | DSPC172H 57310001-MP | 6DD2920-0AJ0 |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs
