ZYGO 8070-0102-01激光头 PDF资料
1.产 品 资 料 介 绍：
ZYGO 8070-0102-01 激光头产品特点
ZYGO 8070-0102-01 是ZYGO公司生产的一款高性能激光头，属于ZMI 7702系列，采用双频氦氖（HeNe）激光技术，主要用于高精度位移测量干涉仪系统，是半导体制造、精密计量等领域的关键光源组件。
该型号主要产品特点：
采用双频氦氖激光技术，输出两个正交线偏振光束。
两频率间偏移量为20 MHz，适用于外差干涉测量。
光束直径有6mm和3mm两种规格可选。
最小输出功率大于400 μW（6mm光束型号）。
可作为ZMI 7702激光头，与ZMI 240X和4X04系列测量板配合使用。
真空波长稳定性优于0.01 ppm/24小时，保障长期测量精度。
光束指向稳定性小于0.1 arc sec/°C，受温度影响极小。
激光器重量约5.5 kg，结构紧凑。
供电要求为±15 VDC，功耗约39瓦（工作时）。
具备±0.1 ppm的真空波长寿命精度。
启辉时间短，典型值小于10秒。
工作温度范围10至30°C，适应实验室及工业环境。
采用抗电磁干扰设计，适用于射频等离子体环境。
配备RS232接口，可用于诊断和固件更新。
原厂制造，具备长期稳定运行的品质保障。
总结：ZYGO 8070-0102-01 激光头作为ZMI 7702系列双频氦氖激光器，具备高功率稳定输出、优异的波长稳定性和指向稳定性等特点，是高精度位移测量干涉仪系统的核心光源组件。
ZYGO 8070-0102-01激光头 英文介绍
ZYGO 8070-0102-01 Laser Head Product Features
ZYGO 8070-0102-01 is a high-performance laser head produced by ZYGO company, belonging to the ZMI 7702 series. It adopts dual frequency helium neon (HeNe) laser technology and is mainly used in high-precision displacement measurement interferometer systems. It is a key light source component in semiconductor manufacturing, precision metrology and other fields.
The main product features of this model are:
Using dual frequency helium neon laser technology, output two orthogonal linearly polarized beams.
The offset between the two frequencies is 20 MHz, suitable for heterodyne interferometry measurement.
The beam diameter is available in two specifications: 6mm and 3mm.
The minimum output power is greater than 400 μ W (6mm beam model).
Can be used as a ZMI 7702 laser head in conjunction with ZMI 240X and 4X04 series measuring boards.
The stability of vacuum wavelength is better than 0.01 ppm/24 hours, ensuring long-term measurement accuracy.
The beam pointing stability is less than 0.1 arc sec/° C and is minimally affected by temperature.
The laser weighs about 5.5 kg and has a compact structure.
The power supply requirement is ± 15 VDC, with a power consumption of approximately 39 watts (during operation).
Has a vacuum wavelength lifetime accuracy of ± 0.1 ppm.
The startup time is short, with a typical value of less than 10 seconds.
The working temperature range is 10 to 30 ° C, suitable for laboratory and industrial environments.
Adopting anti electromagnetic interference design, suitable for RF plasma environment.
Equipped with RS232 interface, it can be used for diagnosis and firmware updates.
Original factory manufacturing, with long-term stable operation quality assurance.
Summary: ZYGO 8070-0102-01 laser head, as a ZMI 7702 series dual frequency helium neon laser, has the characteristics of high power stable output, excellent wavelength stability, and directional stability. It is the core light source component of high-precision displacement measurement interferometer system.
ZYGO 8070-0102-01激光头 产品展示
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