0190-42550射频匹配网络器 PDF资料
1.产 品 资 料 介 绍:
0190-42550 是一款射频匹配网络器(RF Matching Network),主要用于在射频电源与负载之间实现阻抗匹配,确保射频能量高效、稳定地传输,同时降低反射功率,对射频源和工艺系统起到保护作用。
主要功能
阻抗匹配调节
通过匹配网络自动或手动调节,使负载阻抗与射频电源输出阻抗保持一致。
有效减少驻波比(VSWR),提高系统稳定性。
反射功率抑制
显著降低反射回射频源的功率,避免射频发生器因失配而保护或损坏。
工艺稳定性保障
在负载条件变化(如等离子体状态变化)时,快速调整匹配状态,保证工艺一致性。
工业级结构设计
适合连续运行和高功率射频环境,具备良好的散热与抗干扰能力。
典型应用场景
半导体制造设备中的等离子体刻蚀、沉积系统
真空镀膜、等离子清洗设备
射频加热、表面处理与等离子工艺设备
其他需要稳定射频功率耦合的高频工业系统
0190-42550射频匹配网络器 英文介绍
0190-42550 is an RF Matching Network designed to achieve impedance matching between RF power sources and loads, ensuring efficient and stable transmission of RF energy while reducing reflected power, providing protection for RF sources and process systems.
Main functions
Impedance matching adjustment
By automatically or manually adjusting the matching network, the load impedance is kept consistent with the output impedance of the RF power supply.
Effectively reduce standing wave ratio (VSWR) and improve system stability.
Reflection power suppression
Significantly reduce the power reflected back to the RF source, avoiding protection or damage to the RF generator due to mismatch.
Process stability guarantee
Quickly adjust the matching state when load conditions change (such as plasma state changes) to ensure process consistency.
Industrial grade structural design
Suitable for continuous operation and high-power RF environments, with good heat dissipation and anti-interference capabilities.
Typical application scenarios
Plasma etching and deposition system in semiconductor manufacturing equipment
Vacuum coating and plasma cleaning equipment
Radio frequency heating, surface treatment, and plasma process equipment
Other high-frequency industrial systems that require stable RF power coupling
0190-42550射频匹配网络器 产品展示

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| PXIe-5540 | R43HEBA-R2-NS-VS-02 | R34JEBC-R2-NS-NV-00 |
| PXIe-5450 | R43HCNA-NP-RW-VS-00 | R43GENA-TS-M2-VS-02 |
| PXIe-5172 | R34JMNC-R2-NS-NV-00 | R43HEBA-TS-NS-NV-00 |
| PXIe-5114 | R24HSNA-R1-NS-VS-06 | R45HCNA-R2-NS-VS-00 |
| PXIe-4610 | R43GENA-R2-NS-NV-07 | R32HSIC-TS-IS-1V-02 |
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