Huttinger  934529V00控制器 PDF资料 

1.产 品 资 料 介 绍：

Huttinger 934529V00 控制器

产品概述

Huttinger 934529V00 是一款 工业级控制器（Controller），用于射频发电机、功率放大器及等离子控制系统中实现核心控制与管理。该控制器负责协调各模块运行、处理控制信号并监控系统状态，是保障设备稳定性和工艺精度的关键组件。

• 型号：934529V00

• 类型：控制器（Controller）

• 功能：模块管理、信号处理、状态监控、控制指令执行

• 应用领域：半导体制造、PVD/CVD 薄膜工艺、等离子处理及科研实验

产品特点

1. 高精度控制

• 对射频功率、电压及电流进行精密调节，实现工艺稳定性。

2. 工业级可靠性

• 支持长期连续运行，耐高温、抗振动及电磁干扰能力强。

3. 模块化设计

• 可与 HUTTINGER 系列射频发电机、功率模块及控制板灵活集成。

4. 保护功能完善

• 内置过流、过压、短路及过温保护，提高设备和系统安全性。

5. 灵活接口

• 支持本地面板操作和远程接口控制，可与自动化系统联动，实现精密工艺管理

英文资料：

Huttinger 934529V00 controller

Product Overview

Huttinger 934529V00 is an industrial grade controller used for core control and management in RF generators, power amplifiers, and plasma control systems. This controller is responsible for coordinating the operation of various modules, processing control signals, and monitoring system status, and is a key component to ensure equipment stability and process accuracy.

Model: 934529V00

Type: Controller

Function: Module management, signal processing, status monitoring, control instruction execution

Application areas: semiconductor manufacturing, PVD/CVD thin film process, plasma treatment, and scientific research experiments

Product Features

high-precision control

Precise adjustment of RF power, voltage, and current to achieve process stability.

Industrial grade reliability

Supports long-term continuous operation, with strong resistance to high temperature, vibration, and electromagnetic interference.

modular design

Flexible integration with HUTTINGER series RF generators, power modules, and control boards.

Complete protection function

Built in overcurrent, overvoltage, short circuit, and over temperature protection to enhance equipment and system safety.

Flexible interface

Support local panel operation and remote interface control, can be linked with automation systems, and achieve precision process management

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