Huttinger  D40/C40-0869控制板 PDF资料 

1.产 品 资 料 介 绍：

Huttinger D40/C40-0869 控制板

产品概述

Huttinger D40/C40-0869 是一款 工业级控制板（Control Board），用于射频发电机、功率放大器及等离子系统中实现核心控制和信号处理功能。该控制板负责管理设备操作、监控系统状态及协调各模块运行，是工业射频和等离子设备的重要组件。

• 型号：D40/C40-0869

• 类型：控制板（Control Board）

• 功能：信号处理、模块管理、状态监控、控制指令执行

• 应用领域：半导体制造、PVD/CVD 薄膜工艺、等离子处理及科研实验

产品特点

1. 精密控制功能

• 高精度管理射频功率、电压或电流，实现工艺稳定性。

2. 工业级可靠性

• 支持长期连续运行，耐高温、抗振动及电磁干扰能力强。

3. 模块化设计

• 可与 HUTTINGER 系列射频发电机、功率模块及其他控制模块灵活集成。

4. 保护机制完善

• 内置过流、过压、短路及过温保护，确保模块及系统安全。

5. 灵活接口控制

• 支持本地面板操作和远程接口控制，可与自动化系统联动。

应用领域

1. 半导体制造

• 等离子刻蚀、离子注入及薄膜沉积工艺的核心控制模块。

2. 薄膜沉积与表面处理

• PVD/CVD 工艺及光学镀膜设备中的精密控制组件。

3. 科研实验

• 材料科学、等离子物理及射频实验中的信号控制和管理。

4. 工业制造

• 精密表面改性、功能性薄膜加工及连续生产工艺设备的控制核心。

英文资料：

Huttinger D40/C40-0869 control board

Product Overview

Huttinger D40/C40-0869 is an industrial grade control board used for core control and signal processing functions in RF generators, power amplifiers, and plasma systems. This control board is responsible for managing equipment operations, monitoring system status, and coordinating the operation of various modules. It is an important component of industrial RF and plasma equipment.

Model: D40/C40-0869

Type: Control Board

Function: Signal processing, module management, status monitoring, control instruction execution

Application areas: semiconductor manufacturing, PVD/CVD thin film process, plasma treatment, and scientific research experiments

Product Features

Precision control function

High precision management of RF power, voltage, or current to achieve process stability.

Industrial grade reliability

Supports long-term continuous operation, with strong resistance to high temperature, vibration, and electromagnetic interference.

modular design

Flexible integration with HUTTINGER series RF generators, power modules, and other control modules.

Improved protection mechanism

Built in overcurrent, overvoltage, short circuit, and over temperature protection ensures the safety of modules and systems.

Flexible interface control

Supports local panel operation and remote interface control, and can be linked with automation systems.

Application field

Semiconductor Manufacturing

The core control module for plasma etching, ion implantation, and thin film deposition processes.

Thin film deposition and surface treatment

Precision control components in PVD/CVD processes and optical coating equipment.

Scientific research experiment

Signal control and management in materials science, plasma physics, and radio frequency experiments.

industrial manufacturing

The control core of precision surface modification, functional film processing, and continuous production process equipment.

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