Edwards YT36-80-100 涡轮分子泵涡轮 PDF资料 

1.产 品 资 料 介 绍：

Edwards YT36-80-100 涡轮分子泵

该型号对应Edwards STP-A1303CV涡轮分子泵，采用磁悬浮轴承技术，适用于半导体制造、薄膜沉积等对高洁净度真空环境有要求的应用场景。

产品特点

• 部件编号YT36-80-100，对应泵型为STP-A1303CV。

• 采用磁悬浮轴承设计，转子无接触运行，几乎无机械磨损。

• 无油运行结构，可提供高洁净度的真空环境。

• 运行噪音和振动极低，适合对运行环境要求较高的场景。

• 采用多级涡轮叶片结构，压缩比高，极限真空稳定。

• 结构紧凑，便于集成到各类真空系统中。

• 适用于半导体刻蚀、CVD、PVD等关键工艺环节。

• 适用于薄膜制备、表面科学等科研实验场景。

• 配备标准真空法兰接口，适配主流真空腔体。

• 该型号以新库存剩余状态流通，使用痕迹极少。

核心参数

• 制造商：Edwards。

• 部件编号：YT36-80-100。

• 对应泵型：STP-A1303CV。

• 产品状态：二手市场新库存剩余品流通。

• 产地：英国。

总结
Edwards YT36-80-100（STP-A1303CV）是一款磁悬浮涡轮分子泵，以无油洁净、低振动高可靠性和紧凑结构为核心优势，适用于半导体及科研领域的高真空需求场景

Edwards  STP-iXR1606C 涡轮分子泵   英文介绍

Edwards YT36-80-100 Turbomolecular Pump

This model corresponds to the Edwards STP-A1303CV turbomolecular pump, which uses magnetic levitation bearing technology and is suitable for applications such as semiconductor manufacturing and thin film deposition that require high cleanliness vacuum environments.

Product Features

Part number YT36-80-100, corresponding to pump type STP-A1303CV.

Adopting magnetic levitation bearing design, the rotor operates without contact and has almost no mechanical wear.

Oil free operating structure can provide a high cleanliness vacuum environment.

The operation noise and vibration are extremely low, suitable for scenarios with high requirements for the operating environment.

Adopting a multi-stage turbine blade structure, with high compression ratio and extreme vacuum stability.

Compact structure, easy to integrate into various vacuum systems.

Suitable for key process steps such as semiconductor etching, CVD, PVD, etc.

Suitable for scientific research experimental scenarios such as thin film preparation and surface science.

Equipped with standard vacuum flange interface, compatible with mainstream vacuum chambers.

This model is circulating in the remaining state of new inventory with very few traces of use.

Core parameters

Manufacturer: Edwards.

Part number: YT36-80-100.

Corresponding pump type: STP-A1303CV.

Product status: New inventory and remaining items in circulation in the second-hand market.

Origin: United Kingdom.

Summary

Edwards YT36-80-100 (STP-A1303CV) is a magnetic levitation turbo molecular pump with core advantages of oil-free cleanliness, low vibration, high reliability, and compact structure, suitable for high vacuum demand scenarios in the semiconductor and scientific research fields

Edwards  STP-iXR1606C 涡轮分子泵  产品图片

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