Edwards PT21FZ000X5涡轮分子泵  PDF资料

1.产 品 资 料 介 绍：

涡轮分子泵就是给工艺腔室“抽高真空”的狠角色。Edwards PT21FZ000X5这款爱德华兹的产品，专门为半导体设备提供强劲的高真空抽取能力。

5个特点

1. 抽气猛：多级涡轮高速旋转，能把腔室抽到高真空甚至超高真空级别。

2. 启动快：电机转速高，短时间内就能把真空抽到位。

3. 扛腐蚀：内部材料和轴承经特殊处理，能耐受氟系等腐蚀性气体。

4. 运行稳：高速旋转时振动小、噪音低，不干扰精密工艺。

5. 爱德华兹的技术底蕴：全球真空泵头部品牌，技术成熟、耐用抗造，坏了也好修。

5个参数

1. 品牌/型号：Edwards / PT21FZ000X5

2. 产品类型：涡轮分子泵

3. 核心功能：超高真空抽取

4. 适用领域：半导体制造及真空镀膜

5. 品牌归属：Edwards（英国爱德华兹，现属Atlas Copco集团）

5个应用领域

1. 半导体刻蚀（Etch）设备的高真空系统

2. 化学气相沉积（CVD）设备的真空抽取

3. 物理气相沉积（PVD）设备的真空营造

4. 扫描电镜等高真空分析仪器

5. 真空镀膜与表面处理设备

结尾

说白了，Edwards PT21FZ000X5就是产线上“抽真空最狠的那个”——靠高速涡轮把气体分子一个个踢出去，让腔室达到极限真空度。抽力大、耐腐蚀、跑得稳，不声不响但干活实在，是半导体厂里靠得住的好帮手。

Edwards PT21FZ000X5涡轮分子泵   英文介绍

Turbomolecular pumps play a crucial role in creating high vacuum in the process chamber. The Edwards PT21FZ000X5, a product of Edwards, is specifically designed to provide strong high vacuum extraction capabilities for semiconductor equipment.

5 characteristics

Intense pumping: The multi-stage turbine rotates at high speed and can pump the chamber to high or even ultra-high vacuum levels.

Fast start-up: The motor has a high speed and can quickly evacuate the vacuum to its desired position.

Corrosion resistance: The internal materials and bearings have been specially treated to withstand corrosive gases such as fluorine.

Stable operation: Low vibration and noise during high-speed rotation, without interfering with precision processes.

Edwards' technical expertise: a global brand of vacuum pump heads, with mature technology, durability, and resistance to manufacturing, making it easy to repair in case of damage.

five parameters

Brand/Model: Edwards/PT21FZ000X5

Product type: Turbomolecular pump

Core function: Ultra high vacuum extraction

Applicable fields: Semiconductor manufacturing and vacuum coating

Brand affiliation: Edwards (UK Edwards, now part of Atlas Copco Group)

5 application areas

High vacuum system for semiconductor etching (Etch) equipment

Vacuum extraction of chemical vapor deposition (CVD) equipment

Vacuum Creation of Physical Vapor Deposition (PVD) Equipment

Scanning electron microscopy and other high vacuum analytical instruments

Vacuum coating and surface treatment equipment

ending

To put it simply, Edwards PT21FZ000X5 is the "toughest vacuum pump" on the production line - relying on high-speed turbines to kick out gas molecules one by one, allowing the chamber to reach the ultimate vacuum degree. Strong pulling force, corrosion resistance, stable running, silent but practical in work, it is a reliable helper in semiconductor factories.

Edwards PT21FZ000X5涡轮分子泵  产品图片

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型号：Edwards PT21FZ000X5涡轮分子泵

质保：一年

成色：全新/二手

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