AMAT 0010-37148双弹簧C型塞组件 PDF资料
双弹簧C型塞组件这东西,在半导体设备里干的就是“堵漏”和“连接”的活,听起来不起眼,但它要是出了问题,气体漏了、真空保不住了,整个工艺就得停摆。AMAT 0010-37148这个型号,就是应用材料设备里一个专门负责密封和连接的小配件。
5个特点
弹簧助力,密封更紧实:内置双弹簧结构,持续提供弹性压力,让C型塞和密封面始终紧密贴合,时间久了也不容易松。
耐腐蚀,扛得住工艺气体:选用耐腐蚀材料,能扛住半导体工艺中那些酸碱气体和副产物的侵蚀,不会用一阵子就锈掉或漏气。
耐高低温:能在半导体工艺常见的高温和低温环境下保持弹性,不会因温度变化而变形或失效。
拆装方便,维护省事:C型结构设计巧妙,不用专用工具也能轻松装拆,设备保养时省时间。
AMAT原厂规格,严丝合缝:专为AMAT设备定制的尺寸和公差,装上就能达到设计密封效果,不用凑合也不用改。
5个参数
品牌/型号:AMAT / 0010-37148
产品类型:双弹簧C型塞组件
核心功能:真空管路或腔室的密封与连接
适用设备:AMAT半导体设备
品牌归属:AMAT(美国应用材料公司)
5个应用领域
AMAT刻蚀设备的真空管路密封
化学气相沉积(CVD)设备的腔室接口密封
物理气相沉积(PVD)设备的密封连接
气体输送管路的快速连接与密封
设备维修与备件更换
结尾
说白了,AMAT 0010-37148就是个“堵漏高手”——靠双弹簧的力道压住密封面,让气体和真空都老老实实待在该待的地方,不跑不泄。它小得不起眼,但在真空系统里要是不给力,工艺就全乱套。AMAT原厂的配件,尺寸刚刚好,换上就严实,是那种“存在感很低、但掉链子就麻烦”的关键小角色。
The double spring C-type plug component is used for "plugging" and "connecting" in semiconductor equipment. It may sound unremarkable, but if there is a problem with it, such as gas leakage or inability to maintain vacuum, the entire process will have to be shut down. The AMAT 0010-37148 model is a small accessory specifically responsible for sealing and connecting in application material equipment.
5 characteristics
Spring assisted, tighter seal: Equipped with a dual spring structure, it continuously provides elastic pressure, ensuring that the C-plug and sealing surface are tightly adhered and not easily loosened over time.
Corrosion resistant and able to withstand process gases: Choosing corrosion-resistant materials can withstand the erosion of acidic and alkaline gases and by-products in semiconductor processes, without rusting or leaking after a while.
High and low temperature resistance: able to maintain elasticity in the common high and low temperature environments of semiconductor processes, without deformation or failure due to temperature changes.
Easy disassembly and easy maintenance: The C-shaped structure is ingeniously designed and can be easily assembled and disassembled without the need for specialized tools, saving time during equipment maintenance.
AMAT original factory specifications, tight fitting: dimensions and tolerances specially customized for AMAT equipment, can achieve the designed sealing effect upon installation, without the need for compromise or modification.
five parameters
Brand/Model: AMAT/0010-37148
Product type: Double spring C-type plug component
Core function: Sealing and connection of vacuum pipelines or chambers
Applicable equipment: AMAT semiconductor equipment
Brand affiliation: AMAT (American Applied Materials Company)
5 application areas
Vacuum pipeline sealing of AMAT etching equipment
Sealing of chamber interfaces in chemical vapor deposition (CVD) equipment
Sealed connection of physical vapor deposition (PVD) equipment
Quick connection and sealing of gas transmission pipelines
Equipment maintenance and spare parts replacement
ending
To put it simply, AMAT 0010-37148 is a "leak sealing expert" - relying on the force of double springs to press the sealing surface, allowing gas and vacuum to stay in their designated areas without escaping or leaking. It is small and inconspicuous, but if it is not awesome in the vacuum system, the process will be completely disordered. AMAT's original accessories have just the right size, and when replaced, they are tight and compact, making them a key small role with a low sense of presence but troublesome if the chain falls off.

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