Daihen 3D80-001479-V2射频发生器 PDF资料
射频发生器这玩意儿,说白了就是给半导体工艺腔室里的等离子体“供电”的。Daihen 3D80-001479-V2这个型号,延续了大亨(Daihen)在射频电源领域一贯的扎实作风,稳定输出、不爱闹脾气,是产线上让人放心的那种类型。
5个特点
输出扎实,不波动:射频功率输出稳当,波动小,工艺重复性好,不会出现今天刻得快明天刻得慢的情况。
转换效率不错:电能损耗小,大部分都转化成有效的射频能量,省电还少发热。
保护功能齐全:有过压、过流、过热保护,遇到异常情况能及时止损,不至于把小毛病拖成大问题。
散热设计靠谱:长时间连着干也不容易过热,不会动不动就降功率或者停机保护。
大亨家的东西,皮实:Daihen在射频电源领域根基深,产品出了名的耐用,用上好几年也没啥毛病,维修率低。
5个参数
品牌/型号:Daihen / 3D80-001479-V2
产品类型:射频功率发生器
核心功能:为等离子体工艺提供射频能量
适用领域:半导体制造设备
品牌归属:Daihen(日本大亨)
5个应用领域
半导体刻蚀(Etch)设备
化学气相沉积(CVD)设备
物理气相沉积(PVD)设备
等离子体清洗设备
离子注入设备
结尾
说白了,Daihen 3D80-001479-V2就是个踏踏实实干活的主儿——把电变成射频能量,稳稳当当喂给工艺腔室。它不会整什么花活,但刻蚀深不深、薄膜匀不匀,全看它给不给力。稳定、耐造、省心,这就是它在产线上最大的本钱。
Daihen 3D80-001479-V2射频发生器 英文介绍
The RF generator, in other words, supplies power to the plasma in the semiconductor process chamber. The Daihen 3D80-001479-V2 model continues Daihen's consistent solid style in the field of RF power supply, with stable output and no tendency to get angry, making it a reassuring type on the production line.
5 characteristics
Solid output without fluctuations: The RF power output is stable, with small fluctuations and good process repeatability, avoiding the situation of cutting fast today and slow tomorrow.
The conversion efficiency is good: the energy loss is small, and most of it is converted into effective RF energy, saving electricity and generating less heat.
Complete protection functions: with overvoltage, overcurrent, and overheating protection, it can stop losses in a timely manner when encountering abnormal situations, so as not to drag small problems into big problems.
Reliable heat dissipation design: It is not easy to overheat even if it is continuously dry for a long time, and it will not easily reduce power or shut down for protection.
Daihen has a deep foundation in the field of RF power supplies, and its products are known for their durability. They have been used for several years without any problems and have a low repair rate.
five parameters
Brand/Model: Daihen/3D80-001479-V2
Product type: RF power generator
Core function: Provide RF energy for plasma processes
Applicable fields: Semiconductor manufacturing equipment
Brand affiliation: Daihen (Japanese tycoon)
5 application areas
Semiconductor Etch Equipment
Chemical Vapor Deposition (CVD) Equipment
Physical Vapor Deposition (PVD) equipment
Plasma cleaning equipment
Ion implantation equipment
ending
To put it simply, Daihen 3D80-001479-V2 is a diligent worker who converts electricity into radio frequency energy and steadily feeds it into the process chamber. It won't do anything, but whether the etching depth is deep or the film is even depends on whether it gives awesome. Stability, durability, and peace of mind are its biggest costs on the production line.
Daihen 3D80-001479-V2射频发生器 产品图片

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