Daihen 2L39-000145-12射频功率发生器 PDF资料

1.产 品 资 料 介 绍：

射频功率发生器这玩意儿，说白了就是把电能转换成射频能量，给工艺腔室里的等离子体“喂饭”用的。Daihen 2L39-000145-12这个型号，就是日本大亨（Daihen）在半导体射频电源领域的一款成熟产品，稳定、耐造，是产线上靠得住的老伙计。

5个特点

1. 输出稳定，不抽风：射频功率输出平稳，波动小，工艺一致性有保障，不会今天刻深了明天刻浅了。

2. 效率高，省电：转换效率不错，输入的电能大部分都能转化成有效的射频功率，不浪费电，发热也少。

3. 保护功能齐全：内置过压、过流、过热等多重保护，万一负载不对劲能自己停下来，不至于把设备烧了。

4. 散热好，不娇气：散热设计到位，长时间大功率连续工作也不容易过热降功率或罢工。

5. 大亨家的老牌品质：Daihen在射频电源领域积累深厚，东西皮实，用个几年都不爱出毛病，维修率低。

5个参数

1. 品牌/型号：Daihen / 2L39-000145-12

2. 产品类型：射频功率发生器

3. 核心功能：为等离子体工艺提供射频能量

4. 适用领域：半导体制造设备

5. 品牌归属：Daihen（日本大亨，射频电源领域的知名厂商）

5个应用领域

1. 半导体刻蚀（Etch）设备

2. 化学气相沉积（CVD）设备

3. 物理气相沉积（PVD）设备

4. 等离子体清洗设备

5. 离子注入设备

结尾

说白了，Daihen 2L39-000145-12就是个“供能管家”——把电变成射频能量，稳稳地喂给工艺腔室里的等离子体。它不显山不露水，但刻蚀深不深、薄膜匀不匀，全看它给不给力。稳定、效率高、不爱坏，这就是它在产线上最大的价值。

Daihen 2L39-000145-12射频功率发生器  英文介绍

The RF power generator, in other words, converts electrical energy into RF energy to feed the plasma in the process chamber. The Daihen 2L39-000145-12 model is a mature product of Japanese tycoon Daihen in the field of semiconductor RF power supply. It is stable and durable, and is a reliable old buddy on the production line.

5 characteristics

Stable output, no ventilation: The RF power output is stable, with small fluctuations and guaranteed process consistency, so it won't go deep today and shallow tomorrow.

High efficiency and power saving: The conversion efficiency is good, and most of the input electrical energy can be converted into effective RF power, without wasting electricity and generating less heat.

Complete protection functions: Built in multiple protections such as overvoltage, overcurrent, and overheating, which can automatically stop the device in case of abnormal load, preventing it from burning out.

Good heat dissipation, not delicate: The heat dissipation design is in place, and long-term high-power continuous operation is not easy to overheat, reduce power or strike.

The long-standing quality of Daihen in the field of RF power supply: Daihen has accumulated a deep foundation in the field of RF power supply, with sturdy materials and a low maintenance rate that never malfunctions after several years of use.

five parameters

Brand/Model: Daihen/2L39-000145-12

Product type: RF power generator

Core function: Provide RF energy for plasma processes

Applicable fields: Semiconductor manufacturing equipment

Brand affiliation: Daihen (Japanese tycoon, well-known manufacturer in the field of RF power supply)

5 application areas

Semiconductor Etch Equipment

Chemical Vapor Deposition (CVD) Equipment

Physical Vapor Deposition (PVD) equipment

Plasma cleaning equipment

Ion implantation equipment

ending

To put it simply, Daihen 2L39-000145-12 is a "power manager" - converting electricity into radio frequency energy and steadily feeding it to the plasma in the process chamber. It does not show mountains and dew, but whether the etching depth is deep and the film is uniform depends on whether it gives awesome. Stability, high efficiency, and no tendency to spoil are its greatest values on the production line.

Daihen 2L39-000145-12射频功率发生器  产品图片

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型号：Daihen 2L39-000145-12射频功率发生器

质保：一年

成色：全新/二手

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