Kawasaki TS310A-D524S晶圆搬运机器人组 PDF资料
晶圆搬运机器人组,听着挺大,干的事儿其实就一个——把晶圆从一个地方安全、准确地搬到另一个地方。Kawasaki TS310A-D524S这个型号,就是川崎在半导体搬运领域里一款靠得住的成熟机型。
5个特点
单臂结构,简单够用:一个手臂搞定搬运,结构不复杂,动作也利索,大多数场景都应付得来。
跑得快还放得准:速度快不稀奇,难得的是快的同时还不跑偏,每片都放得稳稳当当。
专为12英寸晶圆设计:主流300mm晶圆直接适配,拿来就能用,不用折腾改装。
干净不添乱:运行时不怎么产生灰尘,不会给洁净室环境增加污染负担。
川崎家的一贯皮实:出了名的耐用,连续干活不爱坏,维护省心,用着踏实。
5个参数
品牌/型号:Kawasaki / TS310A-D524S
晶圆尺寸:300mm(12英寸)
结构类型:单臂真空晶圆搬运机器人
核心用途:半导体晶圆传输
品牌归属:Kawasaki(日本川崎重工)
5个应用领域
半导体前道工艺中的晶圆传输
半导体设备前端模块(EFEM)
晶圆检测与量测设备
晶圆级封装工序
研发及小批量产线
结尾
说白了,Kawasaki TS310A-D524S就是那种“不说话但干活利索”的类型。它不花哨、不整活,定位准、跑得快、还干净。对于晶圆厂来说,这样一台“稳如老狗”的机器人,比啥都实在。
Kawasaki TS310A-D524S晶圆搬运机器人组 英文介绍
The wafer handling robot group sounds quite large, but its job is actually just one - to safely and accurately move wafers from one place to another. The Kawasaki TS310A-D524S is a reliable and mature model of Kawasaki in the field of semiconductor handling.
5 characteristics
Single arm structure, simple enough: one arm can handle transportation, the structure is not complicated, and the movements are also agile, which can handle most scenarios.
Running fast and accurately: It's not uncommon to have fast speed, but what's rare is that it's fast without running off track, and every piece is placed steadily.
Specially designed for 12 inch wafers: directly compatible with mainstream 300mm wafers, it can be used immediately without any hassle or modification.
Clean and non disruptive: It does not generate much dust during operation and does not add pollution burden to the clean room environment.
Kawasaki's consistent durability: renowned for its durability, not prone to breakage during continuous work, easy to maintain, and reliable in use.
five parameters
Brand/Model: Kawasaki/TS310A-D524S
Wafer size: 300mm (12 inches)
Structure type: Single arm vacuum wafer handling robot
Core application: Semiconductor wafer transport
Brand affiliation: Kawasaki (Kawasaki Heavy Industries, Japan)
5 application areas
Wafer transfer in semiconductor pre-processing
Semiconductor Equipment Front End Module (EFEM)
Wafer inspection and measurement equipment
Wafer level packaging process
Research and development, as well as small-scale production lines
ending
To put it simply, the Kawasaki TS310A-D524S is the type that works efficiently without speaking. It is not fancy or neat, with accurate positioning, fast running, and clean. For wafer fabs, such a "stable as an old dog" robot is more practical than anything else.
Kawasaki TS310A-D524S晶圆搬运机器人组 产品图片

3.其他产品
WOODWARD SPM-D11 8440-1706 B 电动机控制器
KOLLMORGEN SAM-DA-400-07B-P4N-F 数字运动控制器
PROSOFT MVI56E-MNETXT 网络接口模块
4.其他产品
V18345-1010521001 Excitation module
ALSTOM EP3-E-4-A Control card
ALSTOM V4555724-0100 Switch input card
| PMB33C-00214-00 | IMMFP11 | M22NSHS-LNN-NS-02 |
| PMB33C-00201-03 | NKMP03 | 57120001-LE DSAI 135 |
| PMB33C-00201-02 | INNPM12 | PFRL101B 1.0KN 3BSE023315R0004 |
| PMB33C-00201-01 | IPFLD24 | 57160001-NL DSTD 301 |
| PMB33C-00201-00 | PU519 3BSE018681R1 | P22NRXA-LDS-NS-02 |
| PMB33C-00200-03 | NHSS01 | N31HRLJ-LNK-NS-00 |
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