Kawasaki 3NT420B-B029双刀片晶圆传送机器人 PDF资料
说到晶圆传送,说白了就是在跟“效率”和“良率”较劲。Kawasaki 3NT420B-B029这台双刀片机器人,就是专门帮晶圆厂解决“搬得慢、容易出错”这个烦心事的。
5个特点
双手干活,一次顶两次:两只手臂可以同时作业,取旧片和放新片一气呵成,机器空等的时间少了一大半。
跑得快还放得准:速度快不稀奇,难得的是速度快还不会偏,每一片晶圆都放得稳稳当当。
专为12英寸大晶圆设计:主流300mm晶圆正好用,不用额外改装或凑合。
手爪很灵活:能根据不同的设备接口调整抓取方式,不挑设备,好配合。
干净又皮实:运行时不怎么产生灰尘,不会弄脏晶圆,而且连续跑很久也不爱出毛病。
5个参数
型号:Kawasaki 3NT420B-B029
适用晶圆尺寸:300mm(12英寸)
机械结构:双臂/双刀片
用途:半导体晶圆传输
产地:日本
5个应用领域
逻辑芯片(CPU、GPU等)产线
存储芯片(3D NAND、DRAM)制造
晶圆级封装工序
半导体设备的前端模块(EFEM),负责晶圆的进出
化合物半导体(如SiC、GaN)生产
结尾
所以说到底,这台川崎3NT420B-B029干的就是一件实在事——帮晶圆厂把搬运这个环节的效率和良率都提上去。它不挑设备、不爱坏、干活还利索,对产线来说,就是个踏踏实实能出活儿的伙伴。说白了,Kawasaki 3NT420B-B029不是那种花里胡哨的东西,就是一台让你省心、放心、还能多出活的好机器
Kawasaki 3NT420B-B029双刀片晶圆传送机器人 英文介绍
When it comes to wafer transfer, to put it simply, we are competing with "efficiency" and "yield". Kawasaki 3NT420B-B029, a dual blade robot, is specifically designed to help wafer fabs solve the problem of slow and error prone handling.
5 characteristics
Working with both hands, doing it twice at once: both arms can work at the same time, picking up old films and releasing new ones in one go, reducing the waiting time of the machine by half.
Running fast and accurately: It's not uncommon to have fast speed, but what's rare is that the speed is fast and not off center, and every wafer is placed steadily.
Specially designed for 12 inch large wafers: suitable for mainstream 300mm wafers without additional modifications or adjustments.
Claws are very flexible: they can adjust the gripping method according to different device interfaces, without picking devices, and are easy to cooperate with.
Clean and sturdy: It does not generate much dust during operation, does not dirty the wafer, and runs continuously for a long time without any problems.
five parameters
Model: Kawasaki 3NT420B-B029
Applicable wafer size: 300mm (12 inches)
Mechanical structure: Double arm/Double blade
Purpose: Semiconductor wafer transfer
Origin: Japan
5 application areas
Logic chip (CPU, GPU, etc.) production line
Manufacturing of storage chips (3D NAND, DRAM)
Wafer level packaging process
The front-end module (EFEM) of semiconductor equipment is responsible for the entry and exit of wafers
Production of compound semiconductors (such as SiC, GaN)
ending
So ultimately, what this Kawasaki 3NT420B-B029 is doing is a real thing - helping the wafer fab improve the efficiency and yield of the handling process. It is not picky about equipment, does not like to break down, and works efficiently. For the production line, it is a reliable partner who can work hard. To put it simply, Kawasaki 3NT420B-B029 is not that fancy thing, it's just a good machine that makes you worry free, reassured, and able to do more work
Kawasaki 3NT420B-B029双刀片晶圆传送机器人 产品图片

3.其他产品
BENTLY 3500-44-01-00 输出模块
BENTLY 3500/44M 176449-03 振动监控器
PM825 3BSE010796R1 伺服控制器
4.其他产品
3BSE003911R0001 control module
3HAB8101-19 DSQC545A control module
3HAB8101-8/08Y Processing module
| PMB33C-10214-03 | AMAT 0100-00112 | PFTL301E 0.1KN 3BSE019050R100 |
| PMB33C-10214-02 | AMAT 0100-00025 | P21NRFA-LNN-NS-00 |
| PMB33C-10214-01 | 07EB62R1 | 57160001-ACA DSDI 120 |
| PMB33C-10214-00 | AMAT 0100-90313 | 57160001-HK DSTD 185 |
| PMB33C-10201-03 | AMAT 0100-00496 | KT 5191a |
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