Sekidenko 991-0001-00机架式激光传输系统  PDF资料

1.产 品 资 料 介 绍：

聊到Sekidenko 991-0001-00这个机架式激光传输系统，它是Sekidenko（现为MKS Instruments旗下）为半导体工艺监控开发的温度测量设备，主要用于晶圆表面温度的非接触式实时监测。

特点

1. 采用激光光纤测温技术，可实现对晶圆表面温度的实时非接触式测量。

2. 支持多通道配置，可同时监测多个测温点的温度数据。

3. 机架式设计，适合集成于半导体工艺机台的设备标准机柜中。

4. 在半导体刻蚀、沉积等对温度敏感的工艺环节中，用于监控晶圆温度均匀性。

5. 市面流通的多为原厂备件或翻新件，采购时需要确认功能状态和配套光纤附件是否齐全。

参数

1. 货号：Sekidenko 991-0001-00。

2. 产品形态：机架式激光传输系统。

3. 所属品牌：Sekidenko（MKS旗下）。

4. 适配系统：配合Sekidenko测温主机使用。

5. 供应状态：常见为二手可用或翻新件。

用途

1. 半导体刻蚀和沉积工艺中的晶圆温度监控。

2. 需要非接触式实时测温的等离子体工艺。

3. 工艺开发中的温度数据采集和分析。

4. 半导体制造设备中温度测量系统的配套。

5. 老旧设备温度监控系统的维保和替换。

总的来说，991-0001-00是Sekidenko为半导体工艺温度监控设计的激光传输系统，以非接触、实时测量为主要特点，常见于刻蚀和沉积工艺的温度监控环节

Sekidenko 991-0001-00机架式激光传输系统   英文介绍

When it comes to the Sekidenko 991-001-00 rack mounted laser transmission system, it is a temperature measurement device developed by Sekidenko (now under MKS Instruments) for semiconductor process monitoring, mainly used for non-contact real-time monitoring of wafer surface temperature.

Characteristics

By using laser fiber temperature measurement technology, real-time non-contact measurement of wafer surface temperature can be achieved.

Supports multi-channel configuration and can simultaneously monitor temperature data from multiple temperature measurement points.

Rack mounted design, suitable for integration into standard equipment cabinets for semiconductor process machines.

Used to monitor the temperature uniformity of wafers in temperature sensitive processes such as semiconductor etching and deposition.

The products in circulation on the market are mostly original spare parts or refurbished parts. When purchasing, it is necessary to confirm the functional status and whether the supporting fiber optic accessories are complete.

parameter

Item number: Sekidenko 991-0001-00.

Product form: Rack mounted laser transmission system.

Brand: Sekidenko (under MKS).

Adaptation system: Used in conjunction with Sekidenko temperature measurement host.

Supply status: Commonly available second-hand or refurbished parts.

Purpose

Temperature monitoring of wafers in semiconductor etching and deposition processes.

Plasma technology that requires non-contact real-time temperature measurement.

Temperature data collection and analysis in process development.

The matching of temperature measurement system in semiconductor manufacturing equipment.

Maintenance and replacement of temperature monitoring systems for old equipment.

Overall, 991-0001-00 is a laser transmission system designed by Sekidenko for semiconductor process temperature monitoring. It is characterized by non-contact and real-time measurement, and is commonly used in temperature monitoring during etching and deposition processes

Sekidenko 991-0001-00机架式激光传输系统  产品图片

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型号：Sekidenko 991-0001-00机架式激光传输系统

质保：一年

成色：全新/二手

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