Nikon NSR-S620D单板计算机 PDF资料

1.产 品 资 料 介 绍：

聊到Nikon NSR-S620D这个单板计算机模块，它是Nikon光刻系统中负责核心计算和系统控制的关键板卡，属于NSR-S620D ArF浸没式扫描光刻机的专用备件。

特点

1. 作为光刻系统的核心控制器，负责系统启动、计算处理及子系统通信管理。

2. 采用标准VME工业机箱板卡规格，适配Nikon NSR系列机台的背板架构。

3. 安装和更换需要遵循严格的ESD防静电规范，并在系统完全断电下进行操作。

4. 市面上对应的原厂部件号主要有4S015-588和4S015-501-1两种，可作为该模块的采购参考。

5. 模块本身对工作环境洁净度要求较高，需配合机台内部的散热和空气过滤系统使用。

参数

1. 品牌：Nikon。

2. 型号标识：4S015-588（NSR SBC）。

3. 适配系统：Nikon NSR-S620D ArF浸没式扫描光刻机。

4. 板卡形态：标准VME工控板，带边缘连接器，需插入机台背板插槽。

5. 重量：约0.60公斤。

用途

1. Nikon NSR-S620D光刻机的主控计算及系统管理。

2. 光刻系统启动自检、诊断及与各子系统的通信协调。

3. 配套VME机箱，作为系统数据处理和实时控制的核心节点。

4. Nikon NSR系列光刻设备中，板卡层面的备件替换和维护。

5. 需要处理大量实时数据、运行光刻工艺控制算法的专用计算场景。

总的来说，4S015-588是Nikon NSR-S620D光刻机中负责核心运算和控制的单板计算机，属于系统级电子备件

Nikon NSR-S620D单板计算机  英文介绍

When it comes to the Nikon NSR-S620D single board computer module, it is a key board responsible for core computing and system control in the Nikon lithography system, and is a dedicated spare part for the NSR-S620D ArF immersion scanning lithography machine.

Characteristics

As the core controller of the lithography system, responsible for system startup, computational processing, and subsystem communication management.

Adopting standard VME industrial chassis board specifications, compatible with the backplane architecture of Nikon NSR series machines.

Installation and replacement must follow strict ESD anti-static regulations and be carried out with the system completely powered off.

The corresponding original part numbers on the market mainly include 4S015-588 and 4S015-501-1, which can be used as procurement references for this module.

The module itself requires a high level of cleanliness in the working environment and needs to be used in conjunction with the internal heat dissipation and air filtration system of the machine.

parameter

Brand: Nikon.

Model identification: 4S015-588 (NSR SBC).

Adaptation system: Nikon NSR-S620D ArF immersion scanning lithography machine.

Board form: Standard VME industrial control board with edge connectors that need to be inserted into the machine's backplane slot.

Weight: Approximately 0.60 kilograms.

Purpose

The main control calculation and system management of Nikon NSR-S620D lithography machine.

The lithography system starts self checking, diagnosis, and communication coordination with various subsystems.

Equipped with VME chassis, it serves as the core node for system data processing and real-time control.

Replacement and maintenance of spare parts at the board level in Nikon NSR series lithography equipment.

A specialized computing scenario that requires processing large amounts of real-time data and running lithography process control algorithms.

Overall, 4S015-588 is a single board computer responsible for core operations and control in the Nikon NSR-S620D lithography machine, and belongs to the system level electronic spare parts category

Nikon NSR-S620D单板计算机 产品图片

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型号：Nikon NSR-S620D单板计算机

质保：一年

成色：全新/二手

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