Lam 853-232450-002换热底座装配 PDF资料
聊到Lam 853-232450-002这个换热底座装配，它是泛林半导体（Lam Research）工艺机台上用于温度控制的底座组件，在刻蚀或沉积工艺中负责承载晶圆并精确控制其工艺温度。
产品特点
属于Lam Research原厂换热底座组件，用于晶圆工艺过程中的温度精准调控。
适配的机台通常与Novellus系列设备兼容。
组件内含配套的子部件，如标记为M10-080SB0的已安装组件。
市面上多以功能完好的二手可用件形式流通，成色需按实际货源确认。
作为工艺腔室内的关键温控部件，对晶圆工艺均匀性有直接影响。
产品参数
货号：Lam Research 853-232450-002。
产品名称：换热底座装配。
相关部件号：M10-080SB0（已安装组件部件号）。
适配品牌：Lam Research - Novellus。
供应状态：常见为二手可用件。
应用领域
半导体刻蚀工艺中的晶圆温度控制。
CVD和PVD沉积工艺中的基座温控。
Lam Research机台的配套备件和维护替换。
需要精确控制晶圆表面温度的等离子体工艺。
Novellus系列设备的腔体温控系统。
总的来说，853-232450-002是Lam Research为半导体工艺机台配套的换热底座组件，在刻蚀、沉积等需要对晶圆进行精确温度控制的工艺环节中比较常见
When it comes to the assembly of Lam 853-23245-002 heat exchange base, it is a base component used for temperature control on Lam Research process machines. It is responsible for carrying wafers and accurately controlling their process temperature during etching or deposition processes.
Product Features
Belonging to Lam Research's original heat exchange base component, it is used for precise temperature control during wafer processing.
The compatible machines are usually compatible with Novellus series devices.
The component contains supporting sub components, such as the installed component labeled M10-080SB0.
On the market, it is mostly circulated in the form of second-hand usable parts with intact functions, and the condition needs to be confirmed according to the actual source of goods.
As a key temperature control component in the process chamber, it has a direct impact on the uniformity of wafer processing.
Product Specifications
Item number: Lam Research 853-23245-002.
Product Name: Heat Exchange Base Assembly.
Related part number: M10-080SB0 (installed component part number).
Brand adaptation: Lam Research - Novellus.
Supply status: Commonly available second-hand parts.
Application Areas
Wafer temperature control in semiconductor etching process.
Base temperature control in CVD and PVD deposition processes.
Spare parts and maintenance replacement for Lam Research machines.
A plasma process that requires precise control of wafer surface temperature.
The cavity temperature control system of Novellus series devices.
Overall, 853-23245-002 is a heat exchange base component provided by Lam Research for semiconductor process machines. It is commonly used in processes such as etching and deposition that require precise temperature control of wafers
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