Brooks Automation 002-7090-11大气晶圆机器人 PDF资料

1.产 品 资 料 介 绍：

聊到Brooks Automation 002-7090-11这个大气晶圆机器人，它是Brooks专门为半导体设备前端模块等大气环境设计的晶圆搬运核心设备，属于ATR-7或AcuTran 7系列。

特点

1. 重复定位精度可达微米级，确保晶圆传输过程中位置准确。

2. 配备多自由度控制系统，能在不同平面上灵活移动和旋转晶圆。

3. 设计符合半导体洁净室标准，低颗粒排放，适合超净环境长期运行。

4. 在保持精度的同时具备快速搬运能力，适合高产量产线。

5. 采用模块化设计，便于集成；配备智能控制系统，支持实时监控和自诊断。

参数

1. 货号：Brooks Automation 002-7090-11。

2. 产品系列：ATR-7 / AcuTran 7系列大气晶圆搬运机器人。

3. 适配晶圆尺寸：覆盖200mm至300mm。

4. 控制方式：电动伺服平台配合微处理器闭环控制。

5. 配套系统：支持与Brooks专用控制器及上位机系统集成通讯。

用途

1. 半导体设备前端模块中的晶圆上下料与传输。

2. 刻蚀、PVD、CVD等工艺设备的晶圆自动化搬运。

3. 晶圆检测设备的前端物料搬运。

4. 半导体产线中不同工艺模块之间的晶圆调度。

5. 实验室及研发机构的小批量晶圆处理。

总的来说，002-7090-11是Brooks Automation为半导体产线前端传输需求打造的一款大气晶圆机器人，以高洁净度、高精度和高通量为核心特点，在刻蚀、沉积、检测等多个工艺环节的自动化搬运中比较常见

Brooks Automation 002-7090-11大气晶圆机器人  英文介绍

When it comes to the Brooks Automation 002-7090-11 atmospheric wafer robot, it is a core wafer handling equipment designed by Brooks specifically for semiconductor front-end modules and other atmospheric environments. It belongs to the ATR-7 or AcuTran7 series.

Characteristics

The repeated positioning accuracy can reach micrometer level, ensuring accurate positioning during wafer transfer.

Equipped with a multi degree of freedom control system, it can flexibly move and rotate wafers on different planes.

Designed to meet semiconductor cleanroom standards, with low particle emissions, suitable for long-term operation in ultra clean environments.

Capable of fast handling while maintaining accuracy, suitable for high-yield production lines.

Adopting modular design for easy integration; Equipped with an intelligent control system that supports real-time monitoring and self diagnosis.

parameter

Item number: Brooks Automation 002-7090-11.

Product series: ATR-7/AcuTran7 series atmospheric wafer handling robots.

Compatible wafer size: covering 200mm to 300mm.

Control method: Electric servo platform combined with microprocessor closed-loop control.

Supporting system: Supports integrated communication with Brooks dedicated controllers and upper computer systems.

Purpose

Wafer loading, unloading, and transportation in the front-end module of semiconductor equipment.

Automated wafer handling for etching, PVD, CVD and other process equipment.

Front end material handling for wafer inspection equipment.

Wafer scheduling between different process modules in semiconductor production lines.

Small batch wafer processing in laboratories and research and development institutions.

Overall, 002-7090-11 is an atmospheric wafer robot created by Brooks Automation for the front-end transmission needs of semiconductor production lines. It is characterized by high cleanliness, high precision, and high throughput, and is commonly used in automated handling of multiple process steps such as etching, deposition, and inspection

Brooks Automation 002-7090-11大气晶圆机器人 产品图片

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型号：Brooks Automation 002-7090-11大气晶圆机器人

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货