AMAT 0920-00085射频发生器 PDF资料
聊到AMAT 0920-00085这个射频发生器，它是应用材料机台上负责提供等离子体能量的核心部件，由Advanced Energy生产，对应的原厂型号是RF Apex 3013。
特点
由Advanced Energy为AMAT代工生产，是原厂认证的配套射频源。
对应Advanced Energy的RF Apex 3013型号，属于该系列的紧凑型射频发生器。
具备CE认证，符合相关安全和电磁兼容标准。
常与AMAT的刻蚀、沉积等工艺机台配套使用，例如在Producer GT系统中就有搭载。
市面流通的多为二手可用件或翻新件。
参数
货号：AMAT 0920-00085。
产品形态：射频发生器。
对应制造商型号：Advanced Energy RF Apex 3013。
产品编号：3156114-001。
整机重量：约20.3公斤。
用途
半导体刻蚀工艺中的等离子体激发。
PECVD和PVD等沉积工艺的射频供能。
AMAT Producer GT等机台的射频功率源。
晶圆清洗和表面处理工艺中的等离子体源。
半导体制造设备中射频功率系统的配套和维保替换。
总的来说，0920-00085是AMAT机台中应用较广的一款射频发生器，与Advanced Energy的RF Apex 3013为同款设备，在刻蚀、沉积等工艺环节比较常见
AMAT 0920-00085射频发生器 英文介绍
When it comes to the AMAT 0920-00085 RF generator, it is the core component responsible for providing plasma energy on the application material machine. It is produced by Advanced Energy and corresponds to the original factory model RF Apex 3013.
Characteristics
Produced by Advanced Energy as an OEM for AMAT, it is a factory certified matching RF source.
Corresponding to the RF Apex 3013 model of Advanced Energy, it belongs to the compact RF generator series.
Having CE certification and complying with relevant safety and electromagnetic compatibility standards.
Often used in conjunction with AMAT's etching, deposition and other process machines, such as in the Producer GT system.
Most of the items in circulation on the market are second-hand usable parts or refurbished parts.
parameter
Item number: AMAT 0920-00085.
Product form: RF generator.
Corresponding manufacturer model: Advanced Energy RF Apex 3013.
Product Code: 3156114-001.
Overall weight: approximately 20.3 kilograms.
Purpose
Plasma excitation in semiconductor etching process.
RF power supply for deposition processes such as PECVD and PVD.
RF power source for AMAT Producer GT and other machines.
Plasma sources in wafer cleaning and surface treatment processes.
Matching and maintenance replacement of RF power systems in semiconductor manufacturing equipment.
Overall, 0920-00085 is a widely used RF generator in AMAT machines, which is the same equipment as Advanced Energy's RF Apex 3013. It is commonly used in processes such as etching and deposition
AMAT 0920-00085射频发生器 产品图片
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