Sanki Technos CR-712T-A 晶圆传输洁净机器人 PDF资料
聊到Sanki Technos CR-712T-A这款晶圆传输洁净机器人,它是专门为半导体设备配套的自动化搬运核心部件,尤其在日系机台上比较常见。
特点
专为半导体晶圆传输设计,适用于洁净环境下的高精度取放操作。
属于Sanki Technos为Hitachi等设备厂商代工的原厂组件,适配性强。
采用洁净机器人专用设计,减少颗粒产生,满足洁净室要求。
市面流通的多为从机台拆机的可用备件或翻新件。
部分版本有针对特定工艺的配置标识,如铜裸露工艺版本。
参数
货号:Sanki Technos CR-712T-A。
产品形态:晶圆传输洁净机器人。
适配系统:主要配套Hitachi M-712E等刻蚀系统。
关联型号:CR-712T-AC、CR-712V等相关版本。
供应状态:常见为翻新或可用二手备件。
用途
Hitachi M-712E刻蚀系统的晶圆搬运。
半导体前道制造中的自动化晶圆取放。
洁净室环境下的晶圆传送和定位。
日系半导体机台的搬运系统备件替换。
同类晶圆处理设备中的洁净传输应用。
总的来说,CR-712T-A是Sanki Technos为半导体机台配套的晶圆传输洁净机器人,主要见于日系刻蚀设备的自动化搬运环节
Sanki Technos CR-712T-A 晶圆传输洁净机器人 英文介绍
When it comes to Sanki Technos CR-712T-A, a wafer transfer cleaning robot, it is a core component specifically designed for automated handling of semiconductor equipment, especially commonly found on Japanese machines.
Characteristics
Specially designed for semiconductor wafer transfer, suitable for high-precision pick and place operations in clean environments.
It is an original component manufactured by Sanki Technos for equipment manufacturers such as Hitachi, with strong adaptability.
Adopting a specialized design for clean robots to reduce particle generation and meet the requirements of clean rooms.
Most of the available spare parts or refurbished parts circulating in the market are dismantled from the machine.
Some versions have configuration labels specific to certain processes, such as the copper exposed process version.
parameter
Item number: Sanki Technos CR-712T-A.
Product form: Wafer transfer clean robot.
Adaptation system: mainly equipped with etching systems such as Hitachi M-712E.
Related models: CR-712T-AC, CR-712V and other related versions.
Supply status: Commonly refurbished or available second-hand spare parts.
Purpose
Wafer handling for Hitachi M-712E etching system.
Automated wafer handling in semiconductor front-end manufacturing.
Wafer transfer and positioning in cleanroom environment.
Replacement of spare parts for the handling system of Japanese semiconductor machines.
Clean transfer applications in similar wafer processing equipment.
Overall, CR-712T-A is a wafer transfer cleaning robot designed by Sanki Technos for semiconductor machines, mainly used in the automated handling process of Japanese etching equipment
Sanki Technos CR-712T-A 晶圆传输洁净机器人 产品图片

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