Daihen 3D80-001480-V1射频发生器 PDF资料
Daihen 3D80-001480-V1这个射频发生器，其实就是WGA-50E-V这个型号，在半导体产线上主要用来给工艺腔室提供等离子体能量，刻蚀和沉积都离不开它。
产品特点
输出稳定精准，全功率范围内都能保持高精度，工艺重复性好。
DAIHEN在电源领域积累多年，这款耐用性不错。
高速数字控制，输出稳定，保护响应快。
属于“AVANCER”系列，支持脉冲RF输出等先进功能。
AC-RF转换效率达到75%左右，比上一代更省电。
产品参数
货号：Daihen 3D80-001480-V1 / WGA-50E-V。
输出功率：5000W（5kW）。
工作频率：2MHz。
输入规格：三相，200VAC，50/60Hz。
配套关联：常与TEL设备配套使用。
应用领域
半导体刻蚀工艺。
PECVD沉积。
PVD溅射。
光刻胶去胶和腔体清洗。
平板显示和太阳能电池制造。
总的来说，3D80-001480-V1这款5kW/2MHz的射频发生器，是DAIHEN为半导体等离子体工艺打造的成熟产品，稳定性和能效都经过了市场验证，尤其在TEL机台上比较常见。
Daihen 3D80-001480-V1射频发生器 英文介绍
The Daihen 3D80-001480-V1 RF generator, which is actually the WGA-50E-V model, is mainly used on semiconductor production lines to provide plasma energy to process chambers, which is essential for etching and deposition.
Product Features
Stable and accurate output, high precision can be maintained throughout the full power range, and good process repeatability.
DAIHEN has accumulated many years of experience in the power supply field, and this model has good durability.
High speed digital control, stable output, fast protection response.
Belonging to the "AVANCER" series, it supports advanced functions such as pulse RF output.
The AC-RF conversion efficiency reaches around 75%, which is more energy-efficient than the previous generation.
Product Specifications
Item number: Daihen 3D80-001480-V1/WGA-50E-V.
Output power: 5000W (5kW).
Operating frequency: 2MHz.
Input specifications: three-phase, 200VAC, 50/60Hz.
Matching association: often used in conjunction with TEL equipment.
Application Areas
Semiconductor etching process.
PECVD deposition.
PVD sputtering.
Photoresist stripping and cavity cleaning.
Flat panel display and solar cell manufacturing.
Overall, the 3D80-001480-V1 5kW/2MHz RF generator is a mature product developed by DAIHEN for semiconductor plasma technology. Its stability and energy efficiency have been validated by the market, especially on TEL machines.
Daihen 3D80-001480-V1射频发生器 产品图片
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