AMAT 0240-27279双激光机器人模块  PDF资料

1.产 品 资 料 介 绍：

AMAT 0240-27279，就是给机械臂做“视力矫正”的那个双激光校准模块，平时用不上，但机台报错时离了它真玩不转。

特点

1. 双激光交叉定位，比单激光准得多。

2. 专用于AMAT机台机械臂的零点标定和轨迹验证。

3. 内部用的是松下NAiS的激光元件，底子不错。

4. 市面分“可工作”和“当备件”两种成色。

5. 一般以套件形式出，带安装附件和调试工具。

参数

1. 货号：AMAT 0240-27279。

2. 形态：双激光机器人校准夹具套件。

3. 内核：含松下ANR11501、ANR5131、LM10等激光模块。

4. 重量：约18.5公斤。

5. 供应状态：分为可工作级和备件级两种成色。

用途

1. 刻蚀/沉积机台的机械臂校准。

2. 晶圆传输定位精度验证。

3. 定期维护后的零点复标。

4. 设备大修后的机械手性能确认。

5. 配套AMAT主流机型。

总的来说，0240-27279这模块属于备件里的“冷门刚需”，平时用不上，关键时刻缺了它机台就得趴窝。双激光校准的精度直接关系到机械臂的传片稳定性，整机状态和配件完整性是采购时最需要看重的两点

AMAT 0240-27279双激光机器人模块  英文介绍

AMAT 0240-27279， It is the dual laser calibration module used for "vision correction" of the robotic arm. It is not usually needed, but when the machine reports an error, it cannot be played without it.

Characteristics

Dual laser cross positioning is much more accurate than single laser.

Specially designed for zero point calibration and trajectory verification of AMAT machine robotic arms.

Internally, Panasonic NAiS laser components are used, with a good foundation.

There are two colors available on the market: "working" and "spare parts".

Usually in the form of a kit, with installation accessories and debugging tools.

parameter

Item number: AMAT 0240-27279.

Form: Dual laser robot calibration fixture kit.

Core: Includes Panasonic ANR11501, ANR5131, LM10 and other laser modules.

Weight: Approximately 18.5 kilograms.

Supply status: divided into two colors: working grade and spare grade.

Purpose

Calibration of the robotic arm of the etching/deposition machine.

Verification of wafer transfer positioning accuracy.

Zero point re calibration after regular maintenance.

Confirmation of mechanical performance after equipment overhaul.

Supporting mainstream AMAT models.

Overall, the module 0240-27279 belongs to the "niche and essential" category of spare parts, which cannot be used normally. If it is missing in critical moments, the machine will have to collapse. The accuracy of dual laser calibration is directly related to the transfer stability of the robotic arm, and the overall condition of the machine and the integrity of its components are the two most important points to consider when purchasing

AMAT 0240-27279双激光机器人模块 产品图片

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型号：AMAT 0240-27279双激光机器人模块

质保：一年

成色：全新/二手

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