TURBOVAC 410400V0715涡轮泵 PDF资料
Leybold TURBOVAC MAG W 400 iPL 410400V0715 涡轮分子泵：磁悬浮高真空的得力干将
这款410400V0715是Leybold TURBOVAC MAG W 400 iPL系列的磁悬浮涡轮分子泵，采用混合轴承技术（高真空侧磁浮，前级侧陶瓷滚珠），主打无油、低振动、长维护周期，在需要洁净高真空的场合表现很稳。
五个核心特点：
1、磁悬浮轴承设计，高真空侧无磨损运行，振动和噪音都小，适合精密工艺。
2、无油运行，保证真空环境清洁，不会有碳氢化合物污染工艺腔体。
3、皮实耐造，对工艺颗粒和意外充气不敏感，能扛住一定程度的严苛工况。
4、安装灵活，可以朝任意方向安装，不挑空间。
5、德国制造，带CE认证，品质扎实。
五个关键参数：
1、零件号410400V0715，型号TURBOVAC MAG W 400 iPL。
2、入口法兰DN 160 ISO-K，出口法兰NW16。
3、对氮气抽速约365升/秒，极限真空低于10⁻⁸毫巴。
4、需配套控制器使用，适配MAG.DRIVE iS控制器（零件号400001431）。
5、功耗最高400瓦，待机约120瓦，支持风冷或水冷。
五个典型应用：
1、半导体PVD和刻蚀设备的真空系统。
2、薄膜沉积和光学镀膜设备的配套。
3、质谱仪、电子显微镜等分析仪器的真空抽气。
4、科研院所的高真空实验平台。
5、工业真空设备的泵组核心。
Leybold这款TURBOVAC MAG W 400 iPL，抽速快、真空干净、皮实耐用，在磁悬浮分子泵里算得上是让人放心的选择
Leybold TURBOVAC MAG W 400 iPL 410400V0715 Turbomolecular Pump: A Powerful Driver for Magnetic Suspension High Vacuum
This 410400V0715 is a magnetic levitation turbo molecular pump from the Leybold TURBOVAC MAG W 400 iPL series. It uses hybrid bearing technology (high vacuum side magnetic levitation, front stage side ceramic ball) and is characterized by oil-free, low vibration, and long maintenance cycle. It performs stably in situations that require clean high vacuum.
Five core characteristics:
1. Magnetic levitation bearing design, high vacuum side wear free operation, low vibration and noise, suitable for precision processes.
2. Oil free operation ensures a clean vacuum environment and prevents hydrocarbon contamination of the process chamber.
3. Durable and sturdy, insensitive to process particles and accidental inflation, capable of withstanding a certain degree of harsh working conditions.
4. Flexible installation, can be installed in any direction without taking up space.
5. Made in Germany, with CE certification and solid quality.
Five key parameters:
1. Part number 410400V0715, model TURBOVAC MAG W 400 iPL.
2. Inlet flange DN 160 ISO-K, outlet flange NW16.
3. The nitrogen pumping rate is about 365 liters per second, and the ultimate vacuum is below 10 ⁻⁸ millibars.
4. To be used with a matching controller, compatible with MAG.DRIVE iS controller (part number 400001431).
5. The maximum power consumption is 400 watts, and the standby power is about 120 watts. It supports air or water cooling.
Five typical applications:
1. Vacuum systems for semiconductor PVD and etching equipment.
2. Matching of thin film deposition and optical coating equipment.
3. Vacuum pumping of analytical instruments such as mass spectrometers and electron microscopes.
4. The high vacuum experimental platform of the research institute.
5. The pump core of industrial vacuum equipment.
Leybold's TURBOVAC MAG W 400 iPL has fast pumping speed, clean vacuum, and sturdy durability, making it a reassuring choice among magnetic levitation molecular pumps
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