Yaskawa XU-RCM2500T-4机器人手臂模块 PDF资料
Yaskawa XU-RCM2500T-4机器人手臂模块:Nikon光检系统的精密搬运手
这款XU-RCM2500T-4是安川电机为Nikon定制的机器人手臂模块,专门用在Nikon OPTISTATION 7 200mm晶圆自动检测系统里,负责晶圆的取放和传输。安川的机器人以精度高、速度快出名,这款模块在半导体检测设备里扮演着关键角色。
五个核心特点:
1、专为晶圆检测设计,用在Nikon OPTISTATION 7系统,负责200mm晶圆自动化搬运。
2、带陶瓷手臂,陶瓷材质耐磨、重量轻、热膨胀小,适合精密搬运。
3、精度高,安川在运动控制这块是行家,重复定位精准,能把晶圆稳稳放到检测工位。
4、洁净设计,符合半导体检测设备的洁净要求,不污染晶圆表面。
5、安川原厂制造,可靠性有保障,技术成熟。
五个关键参数:
1、零件号XU-RCM2500T-4,安川为Nikon定制的专用型号。
2、用在Nikon OPTISTATION 7 200mm晶圆自动检测系统。
3、配备Nikon原厂陶瓷手臂。
4、主控部分零件号KAB11320/201A-4或201A-3。
5、二手市场多见,是从设备上拆下来的功能备件。
五个典型应用:
1、Nikon OPTISTATION 7晶圆检测系统中的晶圆搬运。
2、半导体检测设备的自动上下料。
3、200mm晶圆在检测工位间的传输和定位。
4、半导体设备维护中的备件更换。
5、晶圆检测产线的日常维保备件。
安川这款XU-RCM2500T-4,是Nikon晶圆检测系统里负责搬运的可靠角色。带着陶瓷手臂把晶圆稳稳当当来回运送,对于维护OPTISTATION 7的朋友来说,这款模块是核心备件之一。
Yaskawa XU-RCM2500T-4机器人手臂模块 英文介绍
Yaskawa XU-RCM2500T-4 Robot Arm Module: Precision Handling Hand for Nikon Optical Inspection System
This XU-RCM2500T-4 is a robot arm module customized by Yaskawa Electric for Nikon, specifically used in the Nikon OPTISTATION 7 200mm wafer automatic inspection system, responsible for wafer picking, placing, and transportation. Yaskawa's robots are known for their high precision and fast speed, and this module plays a key role in semiconductor testing equipment.
Five core characteristics:
1. Specially designed for wafer inspection, used in the Nikon OPTISTATION 7 system, responsible for automated handling of 200mm wafers.
2. Equipped with ceramic arms, the ceramic material is wear-resistant, lightweight, and has low thermal expansion, making it suitable for precision handling.
3. High precision, Yaskawa is an expert in motion control, with precise repeat positioning and the ability to stably place wafers at the inspection station.
4. Clean design that meets the cleanliness requirements of semiconductor testing equipment and does not contaminate the wafer surface.
5. Yaskawa original factory manufacturing, with guaranteed reliability and mature technology.
Five key parameters:
1. Part number XU-RCM2500T-4, a specialized model customized by Yaskawa for Nikon.
2. Used in Nikon OPTION 7 200mm wafer automatic inspection system.
3. Equipped with Nikon original ceramic arms.
4. Main control part part number KAB11320/201A-4 or 201A-3.
5. It is common in the second-hand market, where functional spare parts are removed from equipment.
Five typical applications:
1. Wafer handling in Nikon OPTISTATION 7 wafer inspection system.
2. Automatic loading and unloading of semiconductor testing equipment.
3. Transfer and positioning of 200mm wafers between inspection stations.
4. Replacement of spare parts in semiconductor equipment maintenance.
5. Daily maintenance spare parts for wafer inspection production line.
The XU-RCM2500T-4 from Yaskawa plays a reliable role in handling Nikon wafer inspection systems. Carrying ceramic arms to transport wafers back and forth steadily, this module is one of the core spare parts for friends who maintain the OPTISTATION 7.
Yaskawa XU-RCM2500T-4机器人手臂模块 产品图片

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