Brooks Automation 002-7090-05大气晶圆机器人 PDF资料
Brooks Automation 002-7090-05 ATR-7大气晶圆机器人：半导体产线的精准“搬运工”
在半导体制造里，晶圆搬运是个精细活。这款Brooks Automation 002-7090-05，型号是ATR-7，专为大气环境下的晶圆传输设计。Brooks在这个领域是行业标杆，它的机器人以精度高、速度快、皮实耐用闻名，很多半导体设备里都能看到它的身影。
五个核心特点：
1、定位精度极高，采用微处理器控制的伺服系统，空间重复定位精度能达到0.3微米，晶圆放得准，不容易出偏差。
2、处理速度快，单次取放周期短，产能高，能跟上产线的快节奏。
3、配备视觉系统，能自动识别和定位晶圆，不用人工干预，还能适应不同尺寸的晶圆。
4、洁净设计，符合高等级洁净室标准，配合防静电设计，晶圆传输过程中不易引入污染。
5、智能控制与安全保护，带多种传感器检测晶圆状态，有门联锁、断电保护等功能，能减少碎片和停机风险。
五个关键参数：
1、型号为002-7090-05，属于ATR-7系列大气晶圆搬运机器人。
2、适配晶圆尺寸覆盖200mm到300mm，兼容性强。
3、核心部件采用电动伺服平台，配合微处理器闭环控制。
4、具有光学传感与视觉定位系统，用于晶圆识别与对准。
5、配套Brooks专用控制器，支持与上位机通讯及自动化集成。
五个典型应用：
1、半导体设备前端模块EFEM中的晶圆上下料与传输。
2、刻蚀、PVD、CVD等工艺设备的晶圆自动化搬运。
3、晶圆检测设备的前端物料搬运。
4、半导体产线中不同工艺模块之间的晶圆调度。
5、实验室及研发机构的小批量晶圆处理。
Brooks这款002-7090-05 ATR-7，是半导体产线里负责“跑腿”的可靠角色。它动作快、放得准、还懂得怎么保护晶圆，对于那些追求产能和良率的车间来说，选它心里踏实。
Brooks Automation 002-7090-05大气晶圆机器人 英文介绍
Brooks Automation 002-7090-05 ATR-7 Atmospheric Wafer Robot: Precise 'Mover' for Semiconductor Production Lines
In semiconductor manufacturing, wafer handling is a delicate task. This Brooks Automation 002-7090-05, model ATR-7, is designed specifically for wafer transfer in atmospheric environments. Brooks is the industry benchmark in this field, and its robots are known for their high precision, fast speed, and durability. Its presence can be seen in many semiconductor devices.
Five core characteristics:
1. The positioning accuracy is extremely high, using a servo system controlled by a microprocessor. The spatial repeatability positioning accuracy can reach 0.3 microns, and the wafer is placed accurately without easy deviation.
2. Fast processing speed, short single loading and unloading cycle, high production capacity, able to keep up with the fast pace of the production line.
3. Equipped with a visual system, it can automatically identify and locate wafers without manual intervention, and can also adapt to wafers of different sizes.
4. Clean design, compliant with high-level clean room standards, combined with anti-static design, making it less likely to introduce pollution during wafer transfer.
5. Intelligent control and security protection, equipped with multiple sensors to detect wafer status, with functions such as door interlocking and power-off protection, can reduce debris and downtime risks.
Five key parameters:
1. The model is 002-7090-05, belonging to the ATR-7 series atmospheric wafer handling robot.
2. Compatible with wafer sizes ranging from 200mm to 300mm, with strong compatibility.
3. The core components are equipped with an electric servo platform, coupled with microprocessor closed-loop control.
4. Equipped with optical sensing and visual positioning system for wafer recognition and alignment.
5. Equipped with Brooks dedicated controller, supporting communication with upper computer and automation integration.
Five typical applications:
1. Wafer loading, unloading, and transportation in the front-end module EFEM of semiconductor equipment.
2. Automated wafer handling for etching, PVD, CVD and other process equipment.
3. Front end material handling for wafer inspection equipment.
4. Wafer scheduling between different process modules in semiconductor production lines.
5. Small batch wafer processing in laboratories and research and development institutions.
Brooks' 002-7090-05 ATR-7 is a reliable role responsible for running errands in semiconductor production lines. It is fast in action, accurate in placement, and knows how to protect wafers. For workshops that pursue production capacity and yield, choosing it is reassuring.
Brooks Automation 002-7090-05大气晶圆机器人 产品图片
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WOODWARD 8273-140 2301D 速度控制器
FOXBORO FBM204 数字输出模块
4.其他产品
GE F650BABF2G0LOSHE Relay protector
IBA SM128V Embedded card
ICS TRIPLEX T8461C control module
| SC755B-001-01 | AMAT 0100-02139 | PFCL 201CD-50.0KN |
| SC755A-080-02 | AMAT 0100-71141 | PFCL201C 10KN |
| SC755A-001-02 | AMAT 0100-90480 | DSSB 120 ABB |
| SC754B-001-02 | AMAT 0100-01539 | 57350001-A DSTV 10 ABB |
| SC754A-001-01 | AMAT 0100-00080 | PFCL201C |
| SC753B-001-01 | AMAT 0100-01950 | 57360001-CY DSMB133 ABB |
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