TEL 5011-000186-11光刻胶泵 PDF资料
TEL 5011-000186-11光刻胶泵：光刻工艺的精密“供血”系统
这款5011-000186-11光刻胶泵，是东京电子（TEL）涂胶显影设备里的核心供液组件，由CKD公司代工制造。它在光刻工艺中负责将光刻胶精准、稳定地输送到晶圆表面，直接决定了涂胶的均匀性和工艺质量。
五个核心特点：
1、高精度输送，采用精密计量设计，能保证光刻胶流量稳定、脉冲低，涂出来的胶层厚度均匀。
2、专为光刻胶设计，流路材质和结构针对光刻胶的粘度和特性优化，避免气泡和颗粒污染。
3、与TEL设备无缝集成，是TEL Clean Track系统的原厂配套备件，装上就能用。
4、高洁净度设计，接触光刻胶的部分采用高纯材料，避免金属离子和颗粒析出污染药液。
5、运行稳定可靠，CKD在流体控制领域技术扎实，能适应长时间连续生产不掉链子。
五个关键参数：
1、型号为AMCP-FP-V7C，TEL零件号5011-000186-11。
2、由CKD公司制造，原厂品质有保障。
3、适用于TEL光刻涂胶显影设备。
4、属于光刻工艺专用供液泵，不同于普通化学品泵。
5、二手市场常见为使用过的备件，仍有使用价值。
五个典型应用：
1、TEL涂胶显影设备中的光刻胶供给。
2、半导体光刻工艺中的旋涂供液。
3、光刻胶的定量分配和流量控制。
4、TEL Clean Track系统的配套备件更换。
5、半导体产线中光刻工序的日常维护备件。
TEL这款5011-000186-11，是光刻工艺里负责精准供胶的关键角色。它不像主机那么显眼，但涂胶质量好不好、良率高不高，跟它关系很大。对于搞设备维护的朋友来说，备上它心里踏实。
TEL 5011-000186-11 photoresist pump: precision "blood supply" system for photolithography process
This 5011-000186-11 photoresist pump is the core liquid supply component in Tokyo Electronics (TEL) coating and developing equipment, manufactured by CKD company. It is responsible for accurately and stably delivering photoresist to the wafer surface in the photolithography process, directly determining the uniformity and process quality of the coating.
Five core characteristics:
1. High precision conveying, adopting precise measurement design, can ensure stable photoresist flow, low pulse, and uniform thickness of the coated adhesive layer.
2. Specially designed for photoresist, the flow path material and structure are optimized for the viscosity and characteristics of photoresist to avoid bubble and particle contamination.
3. Seamless integration with TEL equipment, it is an original spare part for TEL Clean Track system, which can be used immediately after installation.
4. High cleanliness design, using high-purity materials for the parts in contact with photoresist to avoid contamination of the solution by metal ions and particle precipitation.
5. Stable and reliable operation, CKD has solid technology in the field of fluid control and can adapt to long-term continuous production without chain failure.
Five key parameters:
1. The model is AMCP-FP-V7C, TEL part number 5011-000186-11.
2. Made by CKD company, the original factory quality is guaranteed.
3. Suitable for TEL photoresist coating and development equipment.
4. It belongs to the dedicated liquid supply pump for photolithography process, different from ordinary chemical pumps.
5. In the second-hand market, commonly used spare parts still have practical value.
Five typical applications:
1. The photoresist supply in TEL coating and developing equipment.
2. Spin coating supply solution in semiconductor lithography process.
3. Quantitative distribution and flow control of photoresist.
4. Replacement of supporting spare parts for TEL Clean Track system.
5. Daily maintenance spare parts for photolithography processes in semiconductor production lines.
TEL's 5011-000186-11 is a key player responsible for precise adhesive supply in photolithography processes. It is not as conspicuous as the host, but the quality of the glue coating and the high yield rate are closely related to it. For friends who are engaged in equipment maintenance, having it prepared is reassuring.
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| SC755B-001-01 | AMAT 0100-02139 | PFCL 201CD-50.0KN |
| SC755A-080-02 | AMAT 0100-71141 | PFCL201C 10KN |
| SC755A-001-02 | AMAT 0100-90480 | DSSB 120 ABB |
| SC754B-001-02 | AMAT 0100-01539 | 57350001-A DSTV 10 ABB |
| SC754A-001-01 | AMAT 0100-00080 | PFCL201C |
| SC753B-001-01 | AMAT 0100-01950 | 57360001-CY DSMB133 ABB |
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