AE 3150258-150射频发生器 PDF资料
AE 3150258-150（VHF Ovation 5060）射频发生器：VHF频段的等离子体利器
搞半导体刻蚀或PVD镀膜的朋友应该都熟悉AE的射频发生器。这款3150258-150，属于VHF Ovation 5060系列，是AE为高频等离子体工艺打造的专用射频电源。在需要更高频率、更均匀等离子体的场合，它是个非常靠谱的选择。
五个核心特点：
1、VHF频段输出，频率高、等离子体密度大，适合高精度刻蚀和沉积工艺。
2、输出稳定，AE在射频控制方面的技术积累扎实，功率输出精度高。
3、控制灵活，支持远程通信和自动化集成，方便接入产线控制系统。
4、设计紧凑，适合集成到19英寸机柜中，不占地方。
5、皮实耐造，AE的射频发生器以可靠耐用闻名，能适应工业环境长期运行。
五个关键参数：
1、型号为VHF Ovation 5060，零件号3150258-150。
2、输入适配208伏三相电，50/60Hz通用。
3、输出频率为54MHz，属于VHF频段。
4、重量约32公斤。
5、AE原厂品质，通过了相关安规认证。
五个典型应用：
1、半导体制造中的高密度等离子体刻蚀。
2、PECVD等离子体增强化学气相沉积工艺。
3、平板显示器和太阳能电池的生产镀膜。
4、等离子体清洗和表面处理工艺。
5、科研机构的等离子体实验和研究平台。
AE这款VHF Ovation 5060，3150258-150，是高频等离子体工艺的得力干将。54MHz的VHF输出让等离子体更均匀、更致密，对于那些追求更高工艺精度的场合来说，它绝对是个让人放心的选择
AE 3150258-150射频发生器 英文介绍
AE 3150258-150 (VHF Ovation 5060) RF Generator: A plasma weapon in the VHF frequency band
Friends who engage in semiconductor etching or PVD coating should be familiar with AE RF generators. This 3150258-150 belongs to the VHF Ovation 5060 series and is a specialized RF power supply designed by AE for high-frequency plasma processes. It is a very reliable choice in situations where higher frequency and more uniform plasma are required.
Five core characteristics:
1. VHF frequency band output, high frequency and high plasma density, suitable for high-precision etching and deposition processes.
2. Stable output, AE has solid technical accumulation in RF control, and high power output accuracy.
3. Flexible control, supporting remote communication and automation integration, convenient access to production line control systems.
4. Compact design, suitable for integration into 19 inch cabinets without taking up space.
5. Durable and sturdy, AE's RF generator is known for its reliability and durability, and can adapt to long-term operation in industrial environments.
Five key parameters:
1. The model is VHF Ovation 5060, part number 3150258-150.
2. Input compatible with 208 volt three-phase power, 50/60Hz universal.
3. The output frequency is 54MHz, belonging to the VHF band.
4. The weight is about 32 kilograms.
5. AE's original factory quality has passed relevant safety certification.
Five typical applications:
1. High density plasma etching in semiconductor manufacturing.
2. PECVD plasma enhanced chemical vapor deposition process.
3. Production and coating of flat panel displays and solar cells.
4. Plasma cleaning and surface treatment processes.
5. Plasma experiments and research platforms of scientific research institutions.
AE's VHF Ovation 50603150258-150 is a powerful player in high-frequency plasma technology. The 54MHz VHF output makes the plasma more uniform and dense, making it a reassuring choice for those seeking higher process precision
AE 3150258-150射频发生器 产品图片
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