ATH V14621B0涡轮分子泵 PDF资料
Pfeiffer ATH 500M V14621B0 涡轮分子泵:高真空的可靠选择
搞真空系统的朋友应该都熟悉Pfeiffer Adixen这个品牌。这款ATH 500M,型号V14621B0,是专门为高真空环境打造的大抽速分子泵。口径大、抽速快,在需要干净高真空的场合表现很稳,业内口碑一直不错。
五个核心特点:
1、抽速给力,对氮气抽速能达到每秒500升,大腔体抽真空不费劲。
2、入口口径大,配的是DN160 ISO-F法兰,还带DN100 ISO-K转接口,接管子灵活方便。
3、适合配合前级泵使用,出口是NW25 KF法兰,跟旋片泵或干泵搭配顺手。
4、属于ATH系列陶瓷球轴承或磁悬浮设计,运行稳定,维护周期长。
5、全进口法国制造,Pfeiffer收购Adixen后延续了阿尔卡特的技术路线,品质扎实。
五个关键参数:
1、型号为ATH 500M,零件号V14621B0。
2、入口法兰DN160 ISO-F,带DN100 ISO-K转接。
3、出口法兰为NW25。
4、属于高真空涡轮分子泵,适合10⁻³到10⁻⁸毫巴范围。
5、单相供电,需配套专用控制器使用。
五个典型应用:
1、半导体工艺中的PVD和刻蚀设备真空系统。
2、科研院所和实验室的高真空实验平台。
3、分析仪器如质谱仪、电子显微镜的真空抽气。
4、表面分析和薄膜制备设备的配套泵。
5、真空镀膜、空间模拟等高真空工业场景。
Pfeiffer这款ATH 500M,V14621B0,是大抽速高真空场合的靠谱选手。口径大、抽速快、皮实耐用,对得起它在真空领域的名头。
ATH V14621B0涡轮分子泵 英文介绍
Pfeiffer ATH 500M V14621B0 Turbomolecular Pump: A Reliable Choice for High Vacuum
Friends who work in vacuum systems should be familiar with the brand Pfeiffer Adixen. This ATH 500M, model V14621B0, is a high pumping speed molecular pump specially designed for high vacuum environments. Large caliber, fast pumping speed, and stable performance in situations requiring clean and high vacuum, with a good reputation in the industry.
Five core characteristics:
1. The pumping speed is awesome, and the pumping speed of nitrogen can reach 500 liters per second. It is not difficult to vacuum the large cavity.
2. The inlet diameter is large, equipped with DN160 ISO-F flange, and also comes with DN100 ISO-K adapter, making the connection flexible and convenient.
3. Suitable for use with front-end pumps, the outlet is NW25 KF flange, which is easy to match with rotary vane pumps or dry pumps.
4. It belongs to the ATH series ceramic ball bearing or magnetic levitation design, with stable operation and long maintenance cycle.
5. Fully imported from France, Pfeiffer has continued Alcatel's technological route with solid quality after acquiring Adixen.
Five key parameters:
1. The model is ATH 500M, part number V14621B0.
2. Inlet flange DN160 ISO-F with DN100 ISO-K adapter.
3. The export flange is NW25.
4. Belonging to high vacuum turbo molecular pumps, suitable for the range of 10 ⁻ to 10 ⁻ millibars.
5. Single phase power supply requires a dedicated controller for use.
Five typical applications:
1. PVD and etching equipment vacuum systems in semiconductor processes.
2. High vacuum experimental platforms for research institutes and laboratories.
3. Vacuum pumping of analytical instruments such as mass spectrometers and electron microscopes.
4. A matching pump for surface analysis and thin film preparation equipment.
5. High vacuum industrial scenarios such as vacuum coating and space simulation.
Pfeiffer's ATH 500M, V14621B0, is a reliable player for high pumping speed and high vacuum situations. With a large caliber, fast pumping speed, and sturdy durability, it lives up to its reputation in the vacuum field.
ATH V14621B0涡轮分子泵 产品图片

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| SR3616-3982-7-48C | AMAT 0100-20152 | 57360001-KM/1 DSMD122 ABB |
| SPBUS-HUB | AMAT 0100-90190 | PFCL241-SE 200KN |
| SM811K01 3BSE018173R1 | AMAT 0100-09246 | 48980001-AG DSSB170 ABB |
| SGC 420 | AMAT 0100-89002 | 57310001-KT/1 DSTC176 ABB |
| SGC 410 | AMAT 0100-76269 | PFEA111-66 |
| SGC 400 | AMAT 0100-66025 | PFCL 201C-20.0KN |
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