Bird Electronics 8921SC13同轴电阻器  PDF资料

1.产 品 资 料 介 绍：

Bird Electronics 8921SC13同轴电阻器是鸟牌Termaline系列的一款大功率同轴负载，业内一般叫它“假负载”，主要用来替代天线或等离子体腔体，给射频发生器当纯阻性负载，方便做功率校准和测试。

产品特点

1. 额定功率5kW，专为大功率工业射频系统设计，刻蚀、沉积这类等离子体工艺都能用

2. 频率覆盖DC到28MHz，但实际上就是针对13.56MHz这个工业标准频率做了精细调校

3. 油介质冷却加散热片壳体，靠自然对流散热就行，不用接水冷，结构皮实、故障点少

4. 驻波比极低，13.56MHz下从空载到满功率，VSWR总变化小于0.1dB，稳定性很让人放心

5. 配QC型LC母头连接器，可以加装联锁温控开关，油温超过236°C会自动断开，防止意外

产品参数

1. 额定功率：5kW连续工作

2. 阻抗：50Ω

3. 频率范围：DC到28MHz，最大VSWR 1.1，典型值低于1.05:1

4. 连接器：QC型LC母头

5. 尺寸重量：832×241×681mm，约57kg，实打实的铁疙瘩

应用领域

1. 半导体工艺中13.56MHz射频发生器的功率校准和验证

2. 刻蚀、PECVD等设备的射频系统调试

3. 射频电源厂商或设备工程师做产线维护时的标准负载

4. 配合Bird 4020等功率传感器组成功率测量系统

5. 设备维护备件库里作为“工作备用件”常备

这款8921SC13说白了就是个“定标”用的硬家伙。花好几万买个铁箱子，不是为了干活，而是为了确保干活的家伙事儿功率是准的。尤其是在13.56MHz这个频率上，VSWR变化能控制在0.1dB以内，用它来校功率探头、调匹配器，心里是有底的。

 Bird Electronics 8921SC13同轴电阻器   英文介绍

Bird Electronics 8921SC13 coaxial resistor is a high-power coaxial load in the Termaline series of the Bird brand. It is commonly referred to as a "false load" in the industry and is mainly used to replace antennas or plasma cavities as a pure resistive load for RF generators, facilitating power calibration and testing.

Product Features

Rated power of 5kW, designed specifically for high-power industrial RF systems, suitable for plasma processes such as etching and deposition

The frequency covers DC to 28MHz, but in reality, it has been finely tuned for the industry standard frequency of 13.56MHz

Oil medium cooling with heat sink shell, relying on natural convection for heat dissipation, without the need for water cooling, with a sturdy structure and fewer fault points

The standing wave ratio is extremely low, with a total VSWR change of less than 0.1dB from no-load to full power at 13.56MHz, and the stability is very reassuring

Equipped with QC type LC female connector, an interlocking temperature control switch can be installed. When the oil temperature exceeds 236 ° C, it will automatically disconnect to prevent accidents

Product Specifications

Rated power: 5kW continuous operation

Impedance: 50 Ω

Frequency range: DC to 28MHz, maximum VSWR 1.1, typical value below 1.05:1

Connector: QC type LC female head

Size and weight: 832 × 241 × 681mm, approximately 57kg, solid iron lumps

Application Areas

Power Calibration and Verification of 13.56MHz RF Generator in Semiconductor Process

RF system debugging of etching, PECVD and other equipment

Standard load for RF power supply manufacturers or equipment engineers during production line maintenance

Cooperate with Bird 4020 and other power sensor group success rate measurement systems

The equipment maintenance spare parts inventory is kept as a regular "working spare part"

This 8921STC13 is simply a tough guy for "calibration". Spending tens of thousands of yuan to buy an iron box is not for work, but to ensure that the worker's power is accurate. Especially at a frequency of 13.56MHz, the VSWR variation can be controlled within 0.1dB. Using it to calibrate power probes and match devices is reassuring.

 Bird Electronics 8921SC13同轴电阻器  产品图片

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型号： Bird Electronics 8921SC13同轴电阻器

质保：一年

成色：全新/二手

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