Koken  KOSLARZE-II 闸阀气缸  PDF资料

1.产 品 资 料 介 绍：

Koken KOSLARZE-II闸阀气缸是日本入江工研为KOSLARZE-II系列矩形真空闸阀配套的气动执行部件，负责驱动阀板完成开关动作，在半导体真空设备里属于那种天天干活、坏了就卡脖子的小件。

工作原理
这个型号用的是单气缸加凸轮机构的搭配，气缸负责把阀板升上去，到了位置之后凸轮把升力转化成压紧力，把阀板牢牢顶在密封面上。新款是升降和密封两个气缸分工，这款用一个气缸加机械联动就把两件事都办了，结构上反而更简单。

产品特点

1. 单气缸+凸轮机械联动，一个缸搞定升降和压紧两步，结构简洁故障点少

2. 无滑动密封设计，运动时不掉颗粒，对洁净度要求高的工艺很友好

3. 金属波纹管密封，漏率极低，能扛250℃高温烘烤，真空环境下很稳

4. 原厂设计寿命100万次开关循环，产线上跑好几年不用大动

5. 矩形闸阀结构，专门给晶圆或基板的狭缝通道用，工艺腔体进出口常见它的身影

产品参数

1. 系列：KOSLARZE-II

2. 制造商：入江工研

3. 结构：矩形闸阀，升降气缸+凸轮机构

4. 密封方式：金属波纹管

5. 适用环境：半导体、FPD等真空设备

应用领域

1. 半导体刻蚀、沉积设备的晶圆传输狭缝阀

2. 平板显示器面板制造中的真空隔离

3. 需要无颗粒、高洁净度的高真空环境

4. 旧机型维护中的备件替换

5. 科研真空装备的腔体通断控制

这款KOSLARZE-II的闸阀气缸说穿了就是个靠机械逻辑干活的老实部件，单缸加凸轮的方案看起来不花哨，但故障少、好维护。搞设备维护的都懂，越是简单的结构，真出问题了排查起来也省事。尤其是这种天天开关几万次的执行件，可靠性比啥都重要。

Koken  KOSLARZE-II 闸阀气缸   英文介绍

The Koken KOSLARZE-II gate valve cylinder is a pneumatic actuator component designed by Japan's Inoue Kogyo Research Institute for the KOSLARZE-II series rectangular vacuum gate valve. It is responsible for driving the valve plate to complete the opening and closing actions. In semiconductor vacuum equipment, it belongs to the small parts that work every day and get stuck when broken.

Working principle

This model uses a combination of a single cylinder and a cam mechanism. The cylinder is responsible for lifting the valve plate up, and when it reaches the position, the cam converts the lift into compression force, firmly pressing the valve plate against the sealing surface. The new model is divided into two cylinders for lifting and sealing. This one uses one cylinder and mechanical linkage to handle both tasks, making the structure simpler.

Product Features

Single cylinder+cam mechanical linkage, one cylinder can handle lifting and pressing in two steps, with a simple structure and few fault points

No sliding seal design, no particles fall off during movement, friendly to processes with high cleanliness requirements

Metal corrugated tube seal, extremely low leakage rate, able to withstand high temperature baking at 250 ℃, stable in vacuum environment

The original factory design has a lifespan of 1 million switch cycles, and it can run on the production line for several years without much effort

Rectangular gate valve structure, specifically designed for narrow channels of wafers or substrates, commonly seen at the inlet and outlet of process chambers

Product Specifications

Series: KOSLARZE-II

Manufacturer: Jiangnan Institute of Technology

Structure: Rectangular gate valve, lifting cylinder+cam mechanism

Sealing method: metal corrugated pipe

Applicable environment: Vacuum equipment such as semiconductors and FPDs

Application Areas

Wafer transfer slit valve for semiconductor etching and deposition equipment

Vacuum isolation in the manufacturing of flat panel display panels

Requires a high vacuum environment with no particles and high cleanliness

Replacement of spare parts in maintenance of old models

On/off control of research vacuum equipment chamber

The gate valve cylinder of this KOSLARZE-II is simply an honest component that relies on mechanical logic to work. The single cylinder with cam scheme may not look fancy, but it has fewer faults and is easy to maintain. Those who are involved in equipment maintenance understand that the simpler the structure, the easier it is to troubleshoot when problems arise. Especially for actuators that switch tens of thousands of times a day, reliability is more important than anything else.

Koken  KOSLARZE-II 闸阀气缸  产品图片

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型号：Koken  KOSLARZE-II 闸阀气缸

质保：一年

成色：全新/二手

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