CLSR-0102B-N2CA 放大器 PDF资料
CLSR-0102B-N2CA放大器是安川电机为尼康NSR系列光刻机定制的一款伺服驱动模块,专门控制光刻机的工件台或掩模台运动轴,在设备圈里属于那种“平时不怎么提、坏了急死人”的关键备件。
产品特点
安川与尼康联合定制,专用于NSR光刻机的RX/RY轴驱动控制
三相200V输入,额定电流0.9A,属于精密小功率伺服驱动,主打精准而非蛮力
日本安川原厂制造,品控扎实,大量产线验证过可靠性
关联尼康多个部件号(4S065-784和4S013-684-1),替换时得确认版本匹不匹配
二手备件市场流通不少,基本靠拆机件供应,说明新件不好买,维护都靠囤货
产品参数
制造商:安川电机
型号:CLSR-0102B-N2CA
尼康部件号:4S065-784 / 4S013-684-1
输入规格:三相200V,50/60Hz,0.9A
产地:日本
应用领域
尼康NSR光刻机的工件台或掩模台运动控制
光刻机传输模块的伺服驱动与定位
半导体产线尼康机型的备件更换与预防性维护
旧机型升级改造时的驱动配套
设备维修商为NSR光刻机储备的常用功能模块
说到底,CLSR-0102B-N2CA这款放大器就是个“专机专用”的东西,精确锁定在尼康NSR光刻机的运动控制上。搞半导体设备维护的老手都清楚,这种定制件一旦坏了,新件不好买,二手拆机件成了主要的货源。所以手边要是有一块确认功能完好的备件,真到了设备趴窝的时候,那就是救命的玩意儿
CLSR-0102B-N2CA 放大器 英文介绍
The CLSR-0102B-N2CA amplifier is a servo drive module customized by Yaskawa Electric for Nikon NSR series lithography machines. It is specifically designed to control the motion axis of the workpiece or mask table of the lithography machine, and is a key spare part in the equipment circle that is "not usually lifted and can cause death when broken".
Product Features
Yaskawa and Nikon jointly customize RX/RY axis drive control for NSR lithography machines
Three phase 200V input, rated current 0.9A, belongs to precision low-power servo drive, focusing on precision rather than brute force
Made in Yaskawa, Japan, with solid quality control and verified reliability on a large number of production lines
Associate multiple Nikon part numbers (4S065-784 and 4S013-684-1), and confirm if the versions do not match when replacing
There is a lot of circulation in the second-hand spare parts market, mainly relying on dismantled parts for supply, indicating that new parts are difficult to buy and maintenance relies on stockpiling
Product Specifications
Manufacturer: Yaskawa Electric
Model: CLSR-0102B-N2CA
Nikon part numbers: 4S065-784/4S013-684-1
Input specifications: Three phase 200V, 50/60Hz, 0.9A
Origin: Japan
Application Areas
Motion Control of Workpiece or Mask Stage in Nikon NSR Lithography Machine
Servo drive and positioning of lithography machine transmission module
Spare parts replacement and preventive maintenance for Nikon models on semiconductor production lines
Driver matching for upgrading and renovating old models
Common functional modules reserved by equipment maintenance vendors for NSR lithography machines
At the end of the day, the CLSR-0102B-N2CA amplifier is a "specialized machine" that is precisely locked onto the motion control of the Nikon NSR lithography machine. Experienced semiconductor equipment maintenance personnel are aware that once these customized parts break down, it is difficult to buy new ones, and second-hand disassembled parts have become the main source of supply. So if you have a spare part with confirmed functionality at hand, it will be a lifesaver when the equipment gets stuck
CLSR-0102B-N2CA 放大器 产品图片

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