TMP-3203LMEC-K1涡轮分子泵  PDF资料

1.产 品 资 料 介 绍：

TMP-3203LMEC-K1涡轮分子泵是岛津公司的一款高真空获取设备，靠高速旋转的叶片把气体分子“踢”出腔体，在半导体和科研领域用得挺多。

产品特点

1. 多级涡轮叶片串联，能抽到10⁻⁶Pa以上的高真空，满足半导体工艺的严苛要求

2. 完全无油运行，不会污染腔体，对洁净度要求高的场景很友好

3. 体积相对紧凑，不占地方，集成到设备里比较方便

4. 岛津原厂出品，这牌子在真空圈子里口碑不错，耐用性是经过验证的

5. 法兰接口是VG300进气和NW40排气，跟主流真空系统兼容性挺好

产品参数

1. 型号：TMP-3203LMEC-K1

2. 类型：涡轮分子泵

3. 制造商：岛津

4. 进气法兰：VG300

5. 排气法兰：NW40

6. 产地：日本

应用领域

1. 半导体刻蚀和沉积设备的真空系统

2. 平板显示镀膜设备的抽气配套

3. 科研用的表面分析仪器

4. 工业真空镀膜

5. 高能物理实验的真空环境维持

这款泵在业内算是成熟型号，市面上流通的不少是翻新或二手件，价格从几千美元不等，侧面说明它技术稳定、够皮实。只要维护得当，在产线上接着用好些年问题不大。

TMP-3203LMEC-K1涡轮分子泵   英文介绍

The TMP-3203LMEC-K1 turbomolecular pump is a high vacuum acquisition device from Shimadzu Corporation, which uses high-speed rotating blades to "kick" gas molecules out of the cavity. It is widely used in the semiconductor and scientific research fields.

Product Features

Multi stage turbine blades connected in series, capable of pumping high vacuum above 10 ⁻⁶ Pa, meeting the stringent requirements of semiconductor technology

Completely oil-free operation, will not contaminate the chamber, and is very friendly to scenarios with high cleanliness requirements

Relatively compact in size, not taking up space, and easy to integrate into the device

Produced by Shimadzu factory, this brand has a good reputation in the vacuum circle and its durability has been verified

The flange interface has VG300 intake and NW40 exhaust, which is compatible with mainstream vacuum systems

Product Specifications

Model: TMP-3203LMEC-K1

Type: Turbomolecular Pump

Manufacturer: Shimadzu

Inlet flange: VG300

Exhaust flange: NW40

Origin: Japan

Application Areas

Vacuum system for semiconductor etching and deposition equipment

Extraction and matching of flat panel display coating equipment

Surface analysis instruments for scientific research

Industrial vacuum coating

Maintenance of Vacuum Environment in High Energy Physics Experiments

This pump is considered a mature model in the industry, and many of the ones circulating on the market are refurbished or second-hand parts, with prices ranging from a few thousand dollars, which indirectly indicates that its technology is stable and sturdy enough. As long as it is maintained properly, it is not a problem to continue using it on the production line for several years.

TMP-3203LMEC-K1涡轮分子泵  产品图片

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型号：TMP-3203LMEC-K1涡轮分子泵 

质保：一年

成色：全新/二手

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