Coherent 4S091-147-2激光模组 PDF资料

1.产 品 资 料 介 绍：

Coherent 4S091-147-2激光模组是Coherent为尼康光刻设备配套的一款激光模块，型号IAC-EOM2，主要用在光学信号发射和检测链路中，属于那种平时不显眼、一坏就全线停机的关键角色。

产品特点

1. 峰值功率30W，功率余量大，处理高要求场景够用

2. 脉冲宽度1µs到1000µs可调，灵活适配不同工艺

3. 波长10.6µm，中红外波段，特定材料加工效果好

4. 专为尼康设备配套，安装匹配度高，省去转接麻烦

5. 美国原厂制造，做工扎实，扛得住半导体厂24小时连轴转

产品参数

1. 部件号：4S091-147-2

2. 型号：IAC-EOM2

3. 最大输出功率：30W

4. 脉冲宽度：1µs~1000µs

5. 波长：10.6µm

6. 产地：美国

应用领域

1. 尼康NSR光刻机的光路系统信号源

2. 晶圆激光检测与定位

3. 光学系统信号调理与功率驱动

4. 半导体产线激光加工环节

5. 光刻设备维护备件库常备模块

整体来看，这款4S091-147-2虽然个头不大，但在尼康光刻系统里扮演着实打实的核心角色。30W功率加10.6µm波长，配合宽幅可调脉冲，基本上把光刻系统对激光模块的主要需求都覆盖到位了。设备维护的同行们心里都清楚，手边备一块靠谱的IAC-EOM2，关键时刻真能救命。

Coherent 4S091-147-2激光模组  英文介绍

Coherent 4S091-147-2 laser module is a laser module provided by Coherent for Nikon lithography equipment, model IAC-EOM2. It is mainly used in optical signal transmission and detection links, and belongs to the key role of being inconspicuous and shutting down the entire line when it breaks down.

Product Features

Peak power of 30W, large power margin, sufficient for handling high demand scenarios

Pulse width adjustable from 1 µ s to 1000 µ s, flexible adaptation to different processes

Wavelength 10.6 µ m, mid infrared band, good processing effect for specific materials

Specially designed to match Nikon equipment, with high installation compatibility, saving the trouble of switching

Made in the United States, with solid workmanship, capable of withstanding 24-hour continuous operation in semiconductor factories

Product Specifications

Part number: 4S091-147-2

Model: IAC-EOM2

Maximum output power: 30W

Pulse width: 1 µ s~1000 µ s

Wavelength: 10.6 µ m

Origin: United States

Application Areas

The optical path system signal source of Nikon NSR lithography machine

Wafer laser detection and positioning

Optical system signal conditioning and power drive

Laser processing stage of semiconductor production line

The spare parts inventory for lithography equipment maintenance has a standing module

Overall, although the 4S091-147-2 is not large in size, it plays a solid core role in Nikon's lithography system. With a power of 30W and a wavelength of 10.6 µ m, combined with wide adjustable pulses, the main requirements of the lithography system for laser modules are basically covered. Colleagues in equipment maintenance know in their hearts that having a reliable IAC-EOM2 at hand can really save lives in critical moments.

Coherent 4S091-147-2激光模组 产品图片

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型号：Coherent 4S091-147-2激光模组

质保：一年

成色：全新/二手

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