Novellus Systems 02-033134-00晶圆底座加热器 PDF资料

1.产 品 资 料 介 绍：

Novellus Systems 02-033134-00晶圆底座加热器是Novellus（现属泛林半导体）为其200mm晶圆沉积设备配套的加热底座，在CVD、ALD等工艺中负责晶圆的均匀加热与精确控温。

产品特点

1. 适配200mm晶圆制程，是薄膜沉积设备的标准温控组件

2. 集成加热与晶圆支撑于一体，结构紧凑

3. 采用耐腐蚀陶瓷材料，适应真空及反应气体环境

4. 内置多区加热与测温传感器，支持闭环温控调节

5. 具备边缘温度补偿能力，提升膜厚均匀性

产品参数

1. 部件号：02-033134-00

2. 晶圆尺寸：200mm

3. 适用设备：Novellus ALTUS等沉积系列

4. 核心功能：晶圆加热与支撑

5. 市场流通状态：新件及可用备件均有供应

应用领域

1. Novellus ALTUS系列CVD/ALD薄膜沉积工艺

2. PECVD、HDP-CVD等工艺腔体的晶圆加热

3. 200mm晶圆产线的薄膜生长与热处理工序

4. Novellus Concept、Vector等系列设备配套备件

5. 半导体设备维护中的加热底座更换与升级

总而言之，Novellus Systems 02-033134-00晶圆底座加热器凭借多区温控与边缘补偿设计，在200mm晶圆薄膜沉积工艺中为温度均匀性与工艺重复性提供了可靠保障，是Novellus系列设备运行与维护中的重要备件。

Novellus Systems 02-033134-00晶圆底座加热器  英文介绍

The Novellus Systems 02-033134-00 wafer base heater is a heating base provided by Novellus (now part of Panlin Semiconductor) for its 200mm wafer deposition equipment. It is responsible for uniform heating and precise temperature control of wafers in processes such as CVD and ALD.

Product Features

Suitable for 200mm wafer process, it is a standard temperature control component for thin film deposition equipment

Integrated heating and wafer support, compact structure

Adopting corrosion-resistant ceramic materials to adapt to vacuum and reactive gas environments

Built in multi zone heating and temperature sensors, supporting closed-loop temperature control adjustment

Capable of compensating for edge temperature and improving film thickness uniformity

Product Specifications

Part number: 02-033134-00

Wafer size: 200mm

Applicable equipment: Novellus ALTUS and other sedimentary series

Core Function: Wafer Heating and Support

Market circulation status: both new parts and available spare parts are in supply

Application Areas

Novellus ALTUS series CVD/ALD thin film deposition process

Wafer heating in PECVD, HDP-CVD and other process chambers

Thin film growth and heat treatment process of 200mm wafer production line

Novellus Concept, Vector and other series of equipment supporting spare parts

Heating Base Replacement and Upgrade in Semiconductor Equipment Maintenance

In summary, the Novellus Systems 02-033134-00 wafer base heater, with its multi zone temperature control and edge compensation design, provides reliable guarantees for temperature uniformity and process repeatability in 200mm wafer thin film deposition processes. It is an important spare part for the operation and maintenance of Novellus series equipment.

Novellus Systems 02-033134-00晶圆底座加热器 产品图片

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型号：Novellus Systems 02-033134-00晶圆底座加热器

质保：一年

成色：全新/二手

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