AMAT 0010-70264机器人驱动器 PDF资料

1.产 品 资 料 介 绍：

AMAT 0010-70264机器人驱动器是应用材料为其Centura系列设备配套的一款高精度机器人驱动组件，集成了驱动板卡、五相步进电机与谐波减速器，是晶圆传输系统的核心驱动部件。

产品特点

1. 集驱动控制与执行机构于一体，负责晶圆传输机器人的上下部驱动

2. 搭载Vextra五相步进电机，提供精确的步进运动控制

3. 配备Harmonic谐波减速器，实现高减速比与低背隙精密传动

4. 专为AMAT Centura系列设备设计，适配真空晶圆传输模块

5. 原厂组件，满足半导体制造对可靠性与洁净度的严苛要求

产品参数

1. 部件号：0010-70264

2. 组件名称：HP机器人驱动上下部组件

3. 集成电机：Vextra五相步进电机

4. 集成减速器：Harmonic

5. 适用机型：AMAT Centura系列

应用领域

1. AMAT Centura系列刻蚀、沉积设备的晶圆传输系统

2. 半导体制造中的真空环境晶圆搬运与定位

3. 晶圆在不同工艺腔室之间的自动传送

4. AMAT Endura等系列设备的机器人驱动备件替换

5. 半导体产线中晶圆传输模块的维护与升级

总而言之，AMAT 0010-70264机器人驱动器作为Centura设备晶圆传输系统的核心驱动组件，通过步进电机与谐波减速器的精密配合，实现了高洁净度真空环境下的精确晶圆搬运。这款0010-70264驱动组件在AMAT半导体设备的日常运行与备件维护中，是不可或缺的关键部件。

AMAT 0010-70264机器人驱动器  英文介绍

The AMAT 0010-70264 robot driver is a high-precision robot driver component that is matched with the Centura series equipment by Applied Materials. It integrates a driver board, a five phase stepper motor, and a harmonic reducer, and is the core driving component of the wafer transfer system.

Product Features

Integrating drive control and execution mechanism, responsible for driving the upper and lower parts of the wafer transfer robot

Equipped with Vextra five phase stepper motor, providing precise step motion control

Equipped with Harmonic harmonic reducer, achieving high reduction ratio and low backlash precision transmission

Specially designed for AMAT Centura series equipment, compatible with vacuum wafer transfer modules

Original components that meet the stringent requirements for reliability and cleanliness in semiconductor manufacturing

Product Specifications

Part number: 0010-70264

Component Name: HP Robot Driver Upper and Lower Components

Integrated motor: Vextra five phase stepper motor

Integrated reducer: Harmonic

Applicable models: AMAT Centura series

Application Areas

Wafer Transfer System for AMAT Centura Series Etching and Deposition Equipment

Vacuum environment wafer handling and positioning in semiconductor manufacturing

Automatic transfer of wafers between different process chambers

Replacement of robot drive spare parts for AMAT Endura and other equipment series

Maintenance and Upgrade of Wafer Transport Modules in Semiconductor Production Lines

In summary, the AMAT 0010-70264 robot driver, as the core driving component of the Centura equipment wafer transfer system, achieves precise wafer handling in high cleanliness vacuum environments through the precise coordination of stepper motors and harmonic reducers. This 0010-70264 driver component is an essential key component in the daily operation and spare parts maintenance of AMAT semiconductor equipment.

AMAT 0010-70264机器人驱动器 产品图片

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型号：AMAT 0010-70264机器人驱动器

质保：一年

成色：全新/二手

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