Edwards NRB4-46-945干式真空泵 PDF资料
Edwards NRB4-46-945干式真空泵是Edwards公司iL70N系列的一款无油干式真空泵,专为半导体及高洁净度工业应用而设计。
产品特点
采用干式无油设计,避免油蒸气污染,保障工艺环境的洁净度
属于iL70N系列螺杆泵产品线,具备出色的工艺气体处理能力
泵体接触材料选用铜材质,可满足特定工艺对材质兼容性的要求
低振动、低噪音运行,适合对工作环境有较高要求的精密工艺
结构紧凑,易于集成和安装于各类真空系统中
产品参数
部件号:NRB4-46-945
型号:iL70N
输入电压:三相208VAC,50/60Hz
接触材质:铜
产地:英国
应用领域
半导体制造工艺中的腔体抽真空与排气
太阳能电池生产中的镀膜与处理工序
工业真空镀膜系统的抽气配套
冶金、热处理等高温工业过程的真空环境维持
需要洁净无油真空环境的各类科研与工业设备
总而言之,Edwards NRB4-46-945干式真空泵凭借无油化设计和可靠的螺杆泵技术,在半导体、太阳能及工业镀膜等领域中为洁净真空需求提供了高效稳定的解决方案,是值得信赖的真空获取设备。
The Edwards NRB4-46-945 dry vacuum pump is an oil-free dry vacuum pump from Edwards iL70N series, designed specifically for semiconductor and high cleanliness industrial applications.
Product Features
Adopting a dry oil-free design to avoid oil vapor pollution and ensure the cleanliness of the process environment
Belonging to the iL70N series screw pump product line, it has excellent process gas treatment capabilities
The contact material of the pump body is made of copper, which can meet the compatibility requirements of specific processes for materials
Low vibration, low-noise operation, suitable for precision processes with high requirements for the working environment
Compact structure, easy to integrate and install in various vacuum systems
Product Specifications
Part number: NRB4-46-945
Model: iL70N
Input voltage: Three phase 208VAC, 50/60Hz
Contact material: Copper
Origin: United Kingdom
Application Areas
Vacuum pumping and exhaust of cavities in semiconductor manufacturing processes
Coating and processing procedures in solar cell production
Exhaust matching for industrial vacuum coating system
Maintenance of vacuum environment in high-temperature industrial processes such as metallurgy and heat treatment
Various scientific research and industrial equipment that require a clean and oil-free vacuum environment
In summary, the Edwards NRB4-46-945 dry vacuum pump, with its oil-free design and reliable screw pump technology, provides an efficient and stable solution for clean vacuum needs in fields such as semiconductors, solar energy, and industrial coatings. It is a reliable vacuum acquisition equipment.

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