AMAT 0190-08825干式泵 PDF资料
AMAT 0190-08825干式泵是一款由丰田生产、应用材料认证使用的干式真空泵,型号为IPUP T100L,专为半导体制造等严苛工业环境设计。
产品特点
采用无油干式设计,避免油蒸气污染,确保工艺腔体洁净度
能够实现高真空度抽气效果,保证气体纯度与质量
设计简洁,易于维护保养,降低使用成本和维护难度
采用高品质材料与精密工艺制造,具备高可靠性和稳定性
提供多种接口和连接方式,便于与半导体设备集成
产品参数
部件号:0190-08825
型号:IPUP T100L V3.2
制造商:丰田
认证:应用材料认证使用
产地:日本
应用领域
半导体制造工艺中的真空环境维持
应用材料各类设备的配套抽气系统
刻蚀、沉积等工艺腔体的真空获取
晶圆传输系统中的真空搬运与定位
需要无油、洁净高真空环境的工业与科研应用
总而言之,AMAT 0190-08825干式泵作为一款经应用材料认证的丰田IPUP T100L干式真空泵,凭借无油设计和稳定性能,在半导体制造的真空系统中发挥着重要作用。这款0190-08825干式泵在刻蚀、沉积等关键工艺设备的真空获取与维持中,是值得信赖的配套组件。
AMAT 0190-08825干式泵 英文介绍
AMAT 0190-08825 Dry Pump is a dry vacuum pump produced by Toyota and certified by Applied Materials. The model is IPUP T100L, designed specifically for harsh industrial environments such as semiconductor manufacturing.
Product Features
Adopting oil-free dry design to avoid oil vapor pollution and ensure the cleanliness of the process chamber
Capable of achieving high vacuum pumping effect, ensuring gas purity and quality
Design is simple, easy to maintain, reduces usage costs and maintenance difficulty
Made with high-quality materials and precision craftsmanship, it has high reliability and stability
Provide multiple interfaces and connection methods for easy integration with semiconductor devices
Product Specifications
Part number: 0190-08825
Model: IPUP T100L V3.2
Manufacturer: Toyota
Certification: Application Material Certification for Use
Origin: Japan
Application Areas
Maintenance of Vacuum Environment in Semiconductor Manufacturing Process
Supporting exhaust system for various equipment of application materials
Vacuum acquisition of etching, deposition and other process chambers
Vacuum handling and positioning in wafer transfer system
Industrial and scientific applications that require oil-free, clean, and high vacuum environments
In summary, the AMAT 0190-08825 dry pump, as a Toyota IPUP T100L dry vacuum pump certified by Applied Materials, plays an important role in semiconductor manufacturing vacuum systems with its oil-free design and stable performance. This 0190-08825 dry pump is a reliable component for vacuum acquisition and maintenance in key process equipment such as etching and deposition.
AMAT 0190-08825干式泵 产品图片

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