TEL 5085-404811-11机器人控制器 PDF资料

1.产 品 资 料 介 绍：

TEL 5085-404811-11机器人控制器是东京电子为其Lithius系列光刻设备配套的Z轴机器人组件，属于晶圆传输机器人系统的核心控制与运动组件。

产品特点

1. 专为TEL Lithius系列光刻设备设计，是晶圆传输系统的关键部件

2. 属于CRA组件（晶圆机器人手臂）的Z轴部分，负责垂直升降运动控制

3. 适配300mm晶圆传输，满足先进光刻工艺的精度要求

4. 与X、Y、Theta轴协同工作，构成完整手臂系统

5. TEL原厂制造，符合半导体设备对高精度、高洁净度和高可靠性的严苛要求

产品参数

1. 部件号：5085-404811-11

2. 完整名称：Z AXIS (CRA) ASSY, IPL

3. 所属系列：TEL Lithius光刻设备CRA机器人系统

4. 功能定位：Z轴垂直升降控制组件

5. 适配晶圆尺寸：300mm

应用领域

1. TEL Lithius系列光刻设备中的晶圆传输与定位

2. 光刻工艺中的晶圆在工艺模块之间的自动传送

3. 晶圆装载与卸载过程中的精确垂直升降控制

4. TEL光刻设备的备件更换与维护升级

5. 半导体制造产线中光刻区域晶圆搬运系统

总而言之，TEL 5085-404811-11机器人控制器作为Lithius设备CRA机器人系统的Z轴核心组件，在晶圆传输的垂直升降控制中发挥着关键作用。这款Z轴CRA组件与X、Y、Theta轴协同配合，共同构成了TEL光刻设备精密、高效的晶圆搬运系统

TEL 5085-404811-11机器人控制器  英文介绍

The TEL 5085-404811-11 robot controller is a Z-axis robot component provided by Tokyo Electronics for its Lithous series lithography equipment. It is the core control and motion component of the wafer transfer robot system.

Product Features

Specially designed for TEL Lithium series lithography equipment, it is a key component of wafer transfer systems

The Z-axis part belonging to the CRA component (wafer robot arm) is responsible for vertical lifting motion control

Adapt to 300mm wafer transfer and meet the precision requirements of advanced photolithography processes

Collaborate with the X, Y, and Theta axes to form a complete arm system

TEL is manufactured by the original factory and meets the strict requirements of semiconductor equipment for high precision, high cleanliness, and high reliability

Product Specifications

Part number: 5085-404811-11

Full name: Z AXIS (CRA) ASSY, IPL

Series: TEL Lithium Lithography Equipment CRA Robot System

Functional positioning: Z-axis vertical lifting control component

Compatible wafer size: 300mm

Application Areas

Wafer Transfer and Positioning in TEL Lithium Series Lithography Equipment

Automatic transfer of wafers between process modules in photolithography technology

Accurate vertical lifting control during wafer loading and unloading process

Replacement and maintenance upgrade of spare parts for TEL lithography equipment

Wafer Handling System in Photolithography Area of Semiconductor Manufacturing Production Line

In summary, the TEL 5085-404811-11 robot controller, as the Z-axis core component of the Lithius CRA robot system, plays a crucial role in the vertical lifting control of wafer transfer. This Z-axis CRA component works in conjunction with the X, Y, and Theta axes to form a precise and efficient wafer handling system for TEL lithography equipment

TEL 5085-404811-11机器人控制器 产品图片

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型号：TEL 5085-404811-11机器人控制器

质保：一年

成色：全新/二手

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