Advanced Energy 3150058-002射频发生器 PDF资料

1.产 品 资 料 介 绍：

Advanced Energy 3150058-002射频发生器是Advanced Energy公司生产的一款高性能射频电源，型号为RF-20RWC，专为需要稳定射频输出的等离子体工艺而设计。

产品特点

1. 输出功率达2000W，功率强劲

2. 工作频率为13.56 MHz工业标准频段

3. 支持三相208VAC输入，适配工业供电环境

4. 低波纹、低噪声设计，输出稳定可靠

5. 具备过流保护、EMI滤波等多重保护功能

产品参数

1. 型号：RF-20RWC

2. 部件号：3150058-002

3. 输出功率：2kW @ 13.56 MHz

4. 输入电压：三相208VAC，50/60Hz

5. 类别：射频等离子体发生器

应用领域

1. 半导体工艺中的等离子体刻蚀与沉积

2. 平板显示器制造中的PECVD工艺

3. 太阳能电池生产的等离子体处理

4. 科研领域的等离子体研究与材料改性

5. 工业镀膜及表面处理工艺

总而言之，Advanced Energy 3150058-002射频发生器以其2kW输出功率和13.56MHz标准频率，成为等离子体工艺领域的可靠动力源。这款RF-20RWC射频发生器在半导体、显示面板及科研等需要精密射频能量的领域中，发挥着关键作用。

Advanced Energy 3150058-002射频发生器  英文介绍

The Advanced Energy 3150058-002 RF generator is a high-performance RF power supply produced by Advanced Energy, model RF-20RWC, designed specifically for plasma processes that require stable RF output.

Product Features

The output power reaches 2000W, with strong power output

The working frequency is 13.56 MHz in the industrial standard frequency band

Supports three-phase 208VAC input, suitable for industrial power supply environment

Low ripple, low noise design, stable and reliable output

Equipped with multiple protection functions such as overcurrent protection and EMI filtering

Product Specifications

Model: RF-20RWC

Part number: 3150058-002

Output power: 2kW @ 13.56 MHz

Input voltage: Three phase 208VAC, 50/60Hz

Category: RF plasma generator

Application Areas

Plasma etching and deposition in semiconductor processes

PECVD Process in Flat Panel Display Manufacturing

Plasma treatment for solar cell production

Plasma research and material modification in the field of scientific research

Industrial coating and surface treatment process

In summary, the Advanced Energy 3150058-002 RF generator has become a reliable power source in the field of plasma technology with its 2kW output power and 13.56MHz standard frequency. This RF-20RWC RF generator plays a crucial role in fields that require precise RF energy, such as semiconductors, display panels, and scientific research.

Advanced Energy 3150058-002射频发生器 产品图片

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ICS TRIPLEX T8448 controller module
 12KM02E-V0002 3EGM030300R0002 control card
ACROMAG 651T-0600 Digital channel module

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型号：Advanced Energy 3150058-002射频发生器

质保：一年

成色：全新/二手

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