Nikon 4S064-209-3直线电机控制器 PDF资料
Nikon 4S064-209-3 直线电机控制器
Nikon 4S064-209-3 是尼康公司为其 NSR 系列半导体光刻系统配套的直线电机控制器,对应型号 CLSR-1B-N2CD,用于晶圆台的精密运动控制。
一、产品特点(5条)
尼康原厂制造,专为 NSR 系列光刻系统配套。
对应完整控制器型号 CLSR-1B-N2CD。
用于光刻设备中晶圆台直线电机的精密驱动。
日本制造,品质可靠。
市场上以工作良品拆机件状态流通。
二、产品参数(5条)
制造商:Nikon,零件号 4S064-209-3。
关联型号:CLSR-1B-N2CD。
产品类型:直线电机控制器。
适配系统:Nikon NSR 系列光刻系统。
产地:日本。
三、应用领域(5条)
半导体光刻设备晶圆台精密定位。
光刻机内部直线电机驱动控制。
替换老旧或故障的同类控制器。
翻新 Nikon NSR 系列光刻机。
产线关键运动控制备件储备。
总结:Nikon 4S064-209-3(CLSR-1B-N2CD)是尼康 NSR 光刻系统的直线电机控制器,用于晶圆台精密驱动,是设备维护和翻新中的重要备件。
Nikon 4S064-209-3 Linear Motor Controller
Nikon 4S064-209-3 is a linear motor controller provided by Nikon for its NSR series semiconductor lithography system, corresponding to model CLSR-1B-N2CD, used for precision motion control of the wafer stage.
1、 Product features (5 items)
Made by Nikon, specifically designed to complement the NSR series lithography system.
Corresponding to the complete controller model CLSR-1B-N2CD.
Used for precision driving of cylindrical linear motors in lithography equipment.
Made in Japan, with reliable quality.
In the market, it is circulated in the form of dismantled parts with good quality work.
2、 Product parameters (5 items)
Manufacturer: Nikon, part number 4S064-209-3.
Associated model: CLSR-1B-N2CD.
Product type: Linear motor controller.
Adaptation system: Nikon NSR series lithography system.
Origin: Japan.
3、 Application areas (5 items)
Precision positioning of semiconductor lithography equipment wafer stage.
Internal linear motor drive control of lithography machine.
Replace old or faulty controllers of the same type.
Refurbish Nikon NSR series lithography machines.
Reserve of key motion control spare parts for the production line.
Summary: Nikon 4S064-209-3 (CLSR-1B-N2CD) is a linear motor controller for Nikon NSR lithography system, used for precision drive of wafer stage, and is an important spare part in equipment maintenance and refurbishment.

3.其他产品
BENTLY 3500/42M-01-00 位移振动模块
HONEYWELL 05704-A-0146 数字输入/输出模块
SDCS-CON-4-COAT-ROHS电源模块
4.其他产品
BENTLY 3500/42M-01-00 位移振动模块
HONEYWELL 05704-A-0146 数字输入/输出模块
SDCS-CON-4-COAT-ROHS电源模块
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