AE EX9698922S001涡轮分子泵 PDF资料
AE/Varian EX9698922S001 涡轮分子泵
AE/Varian EX9698922S001(TV 551 NAV)是原Varian设计、现属Advanced Energy旗下的磁悬浮涡轮分子泵,用于半导体等需要高洁净度真空的工艺。
一、产品特点(5条)
原Varian设计制造,技术成熟可靠。
磁悬浮轴承,无接触磨损,维护周期长。
洁净无油,适合对污染敏感的工艺。
高抽速和高压缩比,快速达到高真空。
市场上有翻新或二手良品流通。
二、产品参数(5条)
制造商:原Varian / Advanced Energy,零件号EX9698922S001。
型号:TV 551 NAV(TV 551 NAVIGATOR)。
进气口法兰:ISO160,ISO-K型。
出气口法兰:NW25。
产地:意大利,CE认证。
三、应用领域(5条)
半导体刻蚀、CVD、PVD工艺。
平板显示与光伏镀膜。
质谱仪、电子显微镜等分析仪器。
科研与高能物理超高真空应用。
替换老旧或故障的同类分子泵。
总结:AE/Varian EX9698922S001(TV 551 NAV)是一款磁悬浮涡轮分子泵,提供洁净高真空环境,在半导体和科研领域应用广泛
AE/Varian EX9698922S001 Turbomolecular Pump
AE/Varian EX9698922S001 (TV 551 NAV) is a magnetic levitation turbo molecular pump originally designed by Varian and now owned by Advanced Energy. It is used in semiconductor and other processes that require high cleanliness vacuum.
1、 Product features (5 items)
Designed and manufactured by Varian, with mature and reliable technology.
Magnetic levitation bearings have no contact wear and a long maintenance cycle.
Clean and oil-free, suitable for processes that are sensitive to pollution.
High pumping speed and high compression ratio, quickly achieving high vacuum.
There are refurbished or second-hand good products circulating in the market.
2、 Product parameters (5 items)
Manufacturer: Original Varian/Advanced Energy, part number EX9698922S001.
Model: TV 551 NAV.
Inlet flange: ISO160, ISO-K type.
Outlet flange: NW25.
Origin: Italy, CE certified.
3、 Application areas (5 items)
Semiconductor etching, CVD, PVD processes.
Flat panel display and photovoltaic coating.
Analytical instruments such as mass spectrometers and electron microscopes.
Research and application of ultra-high vacuum in high-energy physics.
Replace old or faulty molecular pumps of the same type.
Summary: AE/Varian EX9698922S001 (TV 551 NAV) is a magnetic levitation turbo molecular pump that provides a clean high vacuum environment and is widely used in the semiconductor and scientific research fields

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