AE 3155999-247能量射频导航仪 PDF资料
AE 3155999-247 射频匹配网络
AE 3155999-247 是 Advanced Energy 公司生产的 Navigator II 系列射频匹配网络,用于等离子体工艺中实现射频电源与负载之间的自动阻抗匹配。
一、产品特点(5条)
Advanced Energy 原厂制造,Navigator II 系列。
自动阻抗匹配,提升射频能量传输效率,降低反射功率。
对应 AMAT 零件号 0190-63452,可配套 AMAT 设备使用。
支持 13.56MHz 或 100kHz 频率版本。
市场上有全新库存和良品二手两种状态流通。
二、产品参数(5条)
制造商:Advanced Energy,零件号 3155999-247。
系列:Navigator II。
频率:13.56 MHz 或 100 kHz。
对应客户零件号:AMAT 0190-63452。
产地:中国。
三、应用领域(5条)
半导体刻蚀设备。
化学气相沉积(CVD)。
物理气相沉积(PVD)。
AMAT 设备配套备件。
替换老旧或故障的射频匹配单元。
总结:AE 3155999-247 是用于半导体等离子体工艺的射频匹配网络,对应 AMAT 零件号 0190-63452,是刻蚀和沉积设备维护中的重要备件
AE 3155999-247 RF Matching Network
AE 3155999-247 is a Navigator II series RF matching network produced by Advanced Energy, used in plasma processes to achieve automatic impedance matching between RF power sources and loads.
1、 Product features (5 items)
Advanced Energy factory manufactured, Navigator II series.
Automatic impedance matching improves the efficiency of RF energy transmission and reduces reflected power.
Corresponding to AMAT part number 0190-63452, it can be used with AMAT equipment.
Supports 13.56MHz or 100kHz frequency versions.
There are two states of circulation in the market: new inventory and second-hand good products.
2、 Product parameters (5 items)
Manufacturer: Advanced Energy, part number 3155999-247.
Series: Navigator II.
Frequency: 13.56 MHz or 100 kHz.
Corresponding customer part number: AMAT 0190-63452.
Origin: China.
3、 Application areas (5 items)
Semiconductor etching equipment.
Chemical vapor deposition (CVD).
Physical vapor deposition (PVD).
AMAT equipment supporting spare parts.
Replace old or faulty RF matching units.
Summary: AE 3155999-247 is an RF matching network used in semiconductor plasma processes, corresponding to AMAT part number 0190-63452. It is an important spare part for maintenance of etching and deposition equipment

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