TEL Y331-D204CE 热发生器 PDF资料
TEL Y331-D204CE 热发生器
TEL Y331-D204CE 是东京电子生产的一款热发生器控制单元,用于半导体热处理设备中的温度控制。
一、产品特点(5条)
东京电子原厂制造,专为半导体热处理工艺配套。
用于精确控制热处理过程中的温度。
可应用于 TELINDY 系列批次炉系统的温控模块。
市场常以按现状或未测试的二手备件形式流通。
通常以多件套形式出售,用于维护替换。
二、产品参数(5条)
制造商:Tokyo Electron,零件号 Y331-D204CE。
关联型号:D204 型热发生器控制单元。
关联零件号:TEL 3280-000335-12。
产品类别:热发生器。
市场状态:多为二手或库存备件,按现状出售。
三、应用领域(5条)
半导体扩散炉 – 氧化、退火等热处理工艺的温度控制。
批次型 CVD 设备 – TELINDY 系列的 LPCVD 沉积工艺。
ALD 原子层沉积 – 先进制程中的低温 ALD 工艺。
设备维护与替换 – 更换老旧或故障的热发生器控制单元。
二手设备翻新 – 翻新 TEL 热处理系统时的备件来源。
总结:TEL Y331-D204CE 是东京电子生产的热发生器控制单元,用于半导体扩散炉和批次热处理设备的温度控制,是 TELINDY 等系列设备维护中的重要备件,主要通过二手市场流通。
TEL Y331-D204CE 热发生器 英文介绍
TEL Y331-D204CE Thermal Generator
TEL Y331-D204CE is a heat generator control unit produced by Tokyo Electronics, used for temperature control in semiconductor heat treatment equipment.
1、 Product features (5 items)
Made by Tokyo Electronics' original factory, specifically designed to support semiconductor heat treatment processes.
Used for precise control of temperature during heat treatment process.
Can be applied to the temperature control module of TELINDY series batch furnace system.
The market often circulates in the form of existing or untested second-hand spare parts.
Usually sold in sets of multiple pieces for maintenance and replacement purposes.
2、 Product parameters (5 items)
Manufacturer: Tokyo Electron, part numbers Y331-D204CE.
Associated model: D204 heat generator control unit.
Associated part number: TEL 3280-000335-12.
Product Category: Heat Generator.
Market status: mostly second-hand or inventory spare parts, sold as is.
3、 Application areas (5 items)
Temperature control of semiconductor diffusion furnace - oxidation, annealing and other heat treatment processes.
Batch CVD equipment - TELINDY series LPCVD deposition process.
ALD atomic layer deposition - a low-temperature ALD process in advanced manufacturing processes.
Equipment maintenance and replacement - replace old or faulty heat generator control units.
Second hand equipment refurbishment - source of spare parts for refurbishing TEL heat treatment systems.
Summary: TEL Y331-D204CE is a heat generator control unit produced by Tokyo Electronics, used for temperature control of semiconductor diffusion furnaces and batch heat treatment equipment. It is an important spare part in the maintenance of TELINDY and other series of equipment, mainly circulated through the second-hand market.
TEL Y331-D204CE 热发生器 产品图片

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