Kashiyama NV60N-10 半导体干式真空泵 PDF资料
Kashiyama NV60N-10 半导体干式真空泵
Kashiyama NV60N-10 是日本樫山工业生产的干式真空泵,型号NV60,广泛应用于半导体和液晶面板制造等清洁工艺领域。
一、产品特点(5条)
无油干式运行,避免油蒸汽返流污染工艺环境。
专为半导体等洁净工艺设计,可靠性高。
樫山工业原厂制造,品质有保障。
结构紧凑,适合设备集成。
市场上有制造商翻新品流通。
二、产品参数(5条)
制造商:Kashiyama,型号NV60N-10。
产品型号:NV60。
内部零件号:500715149。
产地:日本。
产品状态:市场上有制造商翻新品流通。
三、应用领域(5条)
半导体制造工艺中的真空抽气。
液晶面板制造中的洁净真空环境。
刻蚀、CVD等工艺的排气系统。
负载锁定室和传输腔的抽真空。
设备维护时替换老旧或故障的同类泵。
总结:Kashiyama NV60N-10 是一款樫山工业生产的干式真空泵,无油运行,专为半导体和液晶制造等洁净工艺设计
Kashiyama NV60N-10 半导体干式真空泵 英文介绍
Kashiyama NV60N-10 Semiconductor Dry Vacuum Pump
Kashiyama NV60N-10 is a dry vacuum pump produced by Kashiyama Kogyo in Japan, model NV60, widely used in clean process fields such as semiconductor and LCD panel manufacturing.
1、 Product features (5 items)
Oil free dry operation to avoid oil vapor reflux and pollution of the process environment.
Specially designed for clean processes such as semiconductors, with high reliability.
Kashiyama Industrial is manufactured by the original factory with guaranteed quality.
Compact structure, suitable for equipment integration.
There are manufacturers circulating new products in the market.
2、 Product parameters (5 items)
Manufacturer: Kashiyama, model NV60N-10.
Product model: NV60.
Internal part number: 500715149.
Origin: Japan.
Product status: There are manufacturers circulating new products in the market.
3、 Application areas (5 items)
Vacuum pumping in semiconductor manufacturing processes.
Clean vacuum environment in LCD panel manufacturing.
Exhaust system for etching, CVD and other processes.
Vacuum extraction of load lock chamber and transmission chamber.
Replace old or faulty pumps of the same type during equipment maintenance.
Summary: Kashiyama NV60N-10 is a dry vacuum pump produced by Kashiyama Industries, designed for clean processes such as semiconductor and LCD manufacturing, with oil-free operation
Kashiyama NV60N-10 半导体干式真空泵 产品图片

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