Kashiyama MU100U-148 干式真空泵 PDF资料

1.产 品 资 料 介 绍：

Kashiyama MU100U-148 干式真空泵

Kashiyama MU100U-148 是日本樫山工业生产的罗茨式干式真空泵，属于MU100系列，采用无油运行技术，广泛用于半导体和液晶制造等清洁工艺。

一、产品特点（5条）

1. 干式罗茨结构，转子与腔壁无接触摩擦，运行稳定。

2. 全程无油运行，无油蒸汽返流，避免污染工艺环境。

3. 空冷设计，无需冷却水，安装方便。

4. 维护周期长，抽取洁净气体时可达三年。

5. 低噪音低振动，适合洁净室环境。

二、产品参数（5条）

1. 制造商：Kashiyama，型号MU100U-148。

2. 抽速：约1,660 L/min。

3. 极限压力：约3.0 Pa。

4. 电源：三相，200-220 VAC，50/60 Hz。

5. 重量约70 kg，尺寸约630×350×360 mm。

三、应用领域（5条）

1. 半导体负载锁定室和传输腔排气。

2. 液晶面板制造中的洁净抽真空。

3. 电子元器件的真空处理。

4. 锂电池干燥和注液前脱气。

5. 科研及实验室真空实验。

总结：Kashiyama MU100U-148 是一款无油空冷的罗茨式干式真空泵，专为半导体等洁净工艺设计，维护周期长、噪音低

Kashiyama MU100U-148 干式真空泵  英文介绍

Kashiyama MU100U-148 Dry Vacuum Pump

Kashiyama MU100U-148 is a Roots type dry vacuum pump produced by Kashiyama Industries in Japan, belonging to the MU100 series. It uses oil-free operation technology and is widely used in clean processes such as semiconductor and liquid crystal manufacturing.

1、 Product features (5 items)

Dry Roots structure, with no contact friction between the rotor and the cavity wall, ensuring stable operation.

The entire process operates without oil, with no oil vapor reflux, to avoid polluting the process environment.

Air cooling design, no need for cooling water, easy to install.

The maintenance cycle is long, and it can take up to three years to extract clean gas.

Low noise and low vibration, suitable for clean room environments.

2、 Product parameters (5 items)

Manufacturer: Kashiyama, model MU100U-148.

Extraction speed: approximately 1660 L/min.

Ultimate pressure: about 3.0 Pa.

Power supply: three-phase, 200-220 VAC, 50/60 Hz.

The weight is about 70 kg and the size is about 630 × 350 × 360 mm.

3、 Application areas (5 items)

Semiconductor load lock chamber and transmission chamber exhaust.

Clean vacuuming in LCD panel manufacturing.

Vacuum treatment of electronic components.

Degassing before drying and liquid injection of lithium batteries.

Research and laboratory vacuum experiments.

Summary: Kashiyama MU100U-148 is an oil-free air-cooled Roots dry vacuum pump designed specifically for clean processes such as semiconductors, with long maintenance cycles and low noise

Kashiyama MU100U-148 干式真空泵 产品图片

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型号：Kashiyama MU100U-148 干式真空泵

质保：一年

成色：全新/二手

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