Adixen ATH1603M 涡轮分子泵 PDF资料
Adixen ATH1603M 磁悬浮涡轮分子泵：特点、参数与应用
Adixen ATH1603M是一款采用五轴主动式磁悬浮轴承的高性能复合分子泵，适用于对洁净度、振动和耐腐蚀性要求极高的半导体与科研场景。
一、产品特点（5条）
五轴主动式磁悬浮轴承 – 转子完全悬浮，无机械接触磨损，免维护，寿命长。
复合式泵浦结构 – 涡轮级加牵引级，抽速大，压缩比高，前级耐压能力强。
超低噪音和振动 – 自动动平衡补偿，噪音低于48 dB(A)，振动极小。
智能断电保护 – 断电时转子动能转为电能，保护轴承和控制系统。
吹扫气体保护 – 可选惰性气体吹扫，防止腐蚀性气体侵蚀轴承核心部件。
二、产品参数（5条）
抽速（N₂）：最高1360 L/s，Ar 1280 L/s，He 940 L/s。
极限压力：低于 6×10⁻⁹ mbar。
转速：39000 rpm，可调待机范围15000～39000 rpm。
电源及功耗：200-240 V AC，单相；功耗约300 W（极限），最大650 W。
安装与冷却：任意方向安装，水冷（水温15-25°C）。
三、应用领域（5条）
半导体制造 – 刻蚀、离子注入、溅射镀膜、CVD等工艺。
平板显示与光学镀膜 – 大面积玻璃镀膜和精密光学涂层。
科研与高能物理 – 粒子加速器、空间模拟、核聚变研究。
分析仪器 – 电子显微镜、质谱仪、表面分析设备。
薄膜沉积与新材料 – ALD、PECVD等先进薄膜工艺。
总结：Adixen ATH1603M是一款集磁悬浮无磨损、高抽速、低振动于一体的旗舰级复合分子泵，是半导体先进制程和尖端科研领域超高真空系统的核心选择。
Adixen ATH1603M Magnetic Suspension Turbomolecular Pump: Characteristics, Parameters, and Applications
Adixen ATH1603M is a high-performance composite molecular pump equipped with five axis active magnetic levitation bearings, suitable for semiconductor and scientific research scenarios that require extremely high cleanliness, vibration, and corrosion resistance.
1、 Product features (5 items)
Five axis active magnetic levitation bearing - the rotor is completely suspended, with no mechanical contact wear, maintenance free, and long service life.
Composite pump structure - turbine stage with traction stage, high pumping speed, high compression ratio, and strong pre stage pressure resistance.
Ultra low noise and vibration - automatic dynamic balance compensation, with noise below 48 dB (A) and minimal vibration.
Intelligent power-off protection - When the power is cut off, the kinetic energy of the rotor is converted into electrical energy to protect the bearings and control system.
Blowing gas protection - Optional inert gas blowing to prevent corrosive gases from corroding the core components of the bearing.
2、 Product parameters (5 items)
Pumping speed (N ₂): up to 1360 L/s, Ar 1280 L/s, He 940 L/s.
Ultimate pressure: below 6 × 10 ⁻⁹ mbar.
Speed: 39000 rpm, adjustable standby range from 15000 to 39000 rpm.
Power supply and power consumption: 200-240 V AC, single-phase; Power consumption is approximately 300 W (maximum), with a maximum of 650 W.
Installation and cooling: Install in any direction, water-cooled (water temperature 15-25 ° C).
3、 Application areas (5 items)
Semiconductor manufacturing - processes such as etching, ion implantation, sputtering coating, CVD, etc.
Flat panel display and optical coating - large-area glass coating and precision optical coating.
Research and High Energy Physics - Particle Accelerator, Space Simulation, Nuclear Fusion Research.
Analytical instruments - electron microscopes, mass spectrometers, surface analysis equipment.
Thin film deposition and new materials - advanced thin film processes such as ALD and PECVD.
Summary: Adixen ATH1603M is a flagship composite molecular pump that integrates magnetic levitation without wear, high pumping speed, and low vibration. It is the core choice for ultra-high vacuum systems in advanced semiconductor processes and cutting-edge scientific research fields.
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| AMAT 0100-00055 | 24250-10922-71 | PR6424/013-030+CON021 |
| AMAT 0100-20051 | 24260-10922-71 | MVI56E-MCM |
| AMAT 0100-90861 | 24260-23300-71 | UFC760BE143 3BHE004573R0143 |
| AMAT 0100-35279 | 24270-10920-71 | MVI56E-MCMR |
| AMAT 0100-00-01486 | 24270-12230-71 | SST-PFB3-VME |
| AMAT 0100-35069 | 24410-22642-71 | BSD0750 |
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