Edwards NRB446945 干式真空泵 PDF资料
Edwards NRB446945(iL70N)干式真空泵:特点、参数与应用
该泵属于Edwards iL70N系列,采用无油干式设计,兼顾洁净度与耐用性,适用于中高要求的工业真空场景。
一、产品特点(5条)
完全无油运行 – 泵腔无需润滑油,杜绝油蒸汽返流,避免工艺污染。
耐腐蚀性强 – 内部流道和转子经特殊处理,能耐受腐蚀性气体和少量粉尘。
全压力范围稳定抽速 – 从大气压到极限真空,抽气性能平稳,排空速度快。
低噪音低振动 – 精密动平衡设计,运行安静,减少对周边设备的干扰。
结构紧凑便于维护 – 占地小,安装灵活,维护接口布局合理,检修便捷。
二、产品参数(5条)
型号/零件号:iL70N / NRB446945。
电源:三相,208 VAC,50/60 Hz。
环境温度:5°C ~ 40°C,风冷为主(可选水冷附件)。
材质:过流部件为球墨铸铁/不锈钢,密封件采用氟橡胶或全氟醚橡胶。
防护等级:IP54,符合CE安全认证。
三、应用领域(5条)
半导体制造 – 刻蚀、CVD/PVD工艺及晶圆搬运的洁净真空需求。
平板显示与光伏 – 镀膜和基板传输过程中的真空抽气。
化工制药 – 分子蒸馏、真空干燥,避免溶剂与油液混合。
热处理与冶金 – 真空钎焊、烧结、退火炉的快速排气。
锂电池生产 – 极片烘烤和注液前的脱气除湿。
总结:Edwards NRB446945 是一款兼顾洁净、稳定和耐用的干式真空泵,适用于电子、化工、新能源等对真空质量要求较高的行业,是保障工艺可靠性的实用选择。
Edwards NRB446945 (iL70N) Dry Vacuum Pump: Features, Parameters, and Applications
This pump belongs to the Edwards iL70N series and features an oil-free dry design that balances cleanliness and durability, making it suitable for medium to high demand industrial vacuum scenarios.
1、 Product features (5 items)
Completely oil-free operation - the pump chamber does not require lubricating oil, preventing oil vapor backflow and avoiding process pollution.
Strong corrosion resistance - The internal flow channel and rotor have been specially treated to withstand corrosive gases and a small amount of dust.
Stable pumping speed across the entire pressure range - from atmospheric pressure to ultimate vacuum, with smooth pumping performance and fast emptying speed.
Low noise and low vibration - precision dynamic balance design, quiet operation, reducing interference with surrounding equipment.
Compact structure for easy maintenance - small footprint, flexible installation, reasonable layout of maintenance interfaces, and convenient maintenance.
2、 Product parameters (5 items)
Model/Part Number: iL70N/NRB446945.
Power supply: three-phase, 208 VAC, 50/60 Hz.
Environmental temperature: 5 ° C to 40 ° C, mainly air-cooled (optional water-cooled accessories).
Material: The overcurrent components are made of ductile iron/stainless steel, and the seals are made of fluororubber or perfluoroether rubber.
Protection level: IP54, compliant with CE safety certification.
3、 Application areas (5 items)
Semiconductor manufacturing - clean vacuum requirements for etching, CVD/PVD processes, and wafer handling.
Flat panel displays and photovoltaics - vacuum pumping during coating and substrate transfer processes.
Chemical and pharmaceutical industries - molecular distillation, vacuum drying, avoiding solvent and oil mixing.
Heat treatment and metallurgy - rapid exhaust of vacuum brazing, sintering, and annealing furnaces.
Lithium battery production - degassing and dehumidification of electrode plates before baking and liquid injection.
Summary: Edwards NRB446945 is a dry vacuum pump that balances cleanliness, stability, and durability. It is suitable for industries such as electronics, chemical, and new energy that require high vacuum quality, and is a practical choice to ensure process reliability.

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