Equipe Technologies FPD-3153 大气传输机器人 PDF资料
Equipe Technologies FPD-3153 是一款半导体晶圆大气传输机器人，主要用于半导体设备前端模块等场景中200mm及300mm晶圆的自动化传送与定位。
产品特点
属于Equipe公司的ATM系列大气机器人产品线，专为晶圆厂前端自动化传输设计。
适配200mm和300mm晶圆规格，覆盖当前主流半导体产线需求。
在二手设备市场中以工作正常状态流通，具备一定的备件储备价值。
可适配于Plasma-Therm Clusterlock 7000等刻蚀系统配套使用。
常见于半导体设备翻新与系统集成中的部件配套场景。
产品参数
品牌：Equipe Technologies。
型号：FPD-3153。
类型：晶圆大气传输机器人。
关联部件：FDP400接口板，部件号2002-0080。
适用系统：Plasma-Therm Clusterlock 7000等工艺设备。
应用领域
半导体设备前端模块中的晶圆装载与传送。
Plasma-Therm Clusterlock 7000等刻蚀系统的晶圆传输配套。
晶圆厂设备维护中的部件更换与备件储备。
二手半导体设备的翻新与关键部件更新。
半导体制造产线中的晶圆中转与自动化搬运。
结尾
Equipe Technologies在精密机器人领域拥有超过9,000台的全球装机量，FPD-3153作为其ATM系列的一员，在半导体晶圆自动化传输方面具有一定的配套价值
Equipe Technologies FPD-3153 大气传输机器人 英文介绍
Equipe Technologies FPD-3153 is a semiconductor wafer atmospheric transfer robot, mainly used for automated transfer and positioning of 200mm and 300mm wafers in front-end modules and other scenarios of semiconductor equipment.
Product Features
The ATM series atmospheric robot product line belonging to Equipe company is designed specifically for front-end automated transmission in wafer fabs.
Compatible with 200mm and 300mm wafer specifications, covering the current mainstream semiconductor production line needs.
Circulating normally in the second-hand equipment market, it has a certain reserve value for spare parts.
Suitable for use with etching systems such as Plasma Therm Clusterlock 7000.
Commonly seen in component matching scenarios in semiconductor equipment refurbishment and system integration.
Product Parameters
Brand: Equipe Technologies.
Model: FPD-3153.
Type: Wafer atmospheric transport robot.
Associated component: FDP400 interface board, part number 2002-0080.
Applicable systems: Plasma Therm Clusterlock 7000 and other process equipment.
Application Areas
Wafer loading and transportation in the front-end module of semiconductor equipment.
Wafer transfer support for etching systems such as Plasma Therm Clusterlock 7000.
Component replacement and spare parts reserve in wafer fab equipment maintenance.
Refurbishment and key component updates of second-hand semiconductor equipment.
Wafer transfer and automated handling in semiconductor manufacturing production lines.
ending
Equipe Technologies has a global installed capacity of over 9000 precision robots, and FPD-3153, as a member of its ATM series, has certain supporting value in semiconductor wafer automation transmission
Equipe Technologies FPD-3153 大气传输机器人 产品图片
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