AMAT 0190-13851 旋转联合溅射机 PDF资料
AMAT 0190-13851 是应用材料公司半导体PVD设备中使用的旋转联合溅射机组件，对应Deublin品牌生产的旋转接头，型号为20212-200，主要用于溅射工艺中的旋转阴极冷却与介质传输。
产品特点
由Deublin公司为应用材料定制生产，原厂配套于AMAT溅射系统。
采用旋转接头设计，可在旋转状态下传输冷却水或工艺介质，保障旋转阴极稳定运行。
作为溅射阴极组件的关键部件，直接参与靶材冷却与旋转驱动环节。
在二手设备市场多以新品或翻新状态流通，具备一定备件储备价值。
产品以单品形式销售，常见于设备维修维护中的部件更换场景。
产品参数
品牌：Deublin，配套于应用材料系统。
对应型号：20212-200。
AMAT部件号：0190-13851。
类型：旋转接头，用于溅射阴极冷却与介质传输。
适用范围：应用材料PVD溅射设备配套。
应用领域
半导体PVD工艺中旋转溅射阴极的冷却液传输。
应用材料溅射设备的日常维护与部件更换。
二手半导体溅射设备的翻新与关键部件更新。
晶圆厂设备备件库储备，保障产线连续运转。
物理气相沉积工艺中旋转靶材的配套组件。
结尾
AMAT 0190-13851（Deublin 20212-200）旋转接头是应用材料溅射系统中保障旋转阴极冷却和介质传输的关键部件，其密封性能直接影响溅射工艺的稳定性，在设备运维和备件采购中是需要重点关注的组件。
AMAT 0190-13851 is a rotary joint sputtering machine component used in the semiconductor PVD equipment of Applied Materials Company. It corresponds to the rotary joint produced by Deublin brand, model 20212-200, and is mainly used for rotating cathode cooling and medium transfer in sputtering processes.
Product Features
Customized production of application materials by Deublin company, with original factory matching for AMAT sputtering system.
Adopting a rotary joint design, it can transmit cooling water or process media in a rotating state, ensuring stable operation of the rotating cathode.
As a key component of the sputtering cathode assembly, it directly participates in the cooling and rotation drive of the target material.
In the second-hand equipment market, it is mostly circulated as new or refurbished products, with a certain reserve value for spare parts.
The product is sold as a single item and is commonly used in component replacement scenarios during equipment maintenance and repair.
Product Parameters
Brand: Deublin, compatible with application material systems.
Corresponding model: 20212-200.
AMAT part number: 0190-13851.
Type: Rotary joint, used for sputtering cathode cooling and medium transfer.
Scope of application: Used in conjunction with PVD sputtering equipment.
Application Areas
Cooling liquid transfer of rotating sputtering cathode in semiconductor PVD process.
Daily maintenance and component replacement of material sputtering equipment.
Refurbishment and key component updates of second-hand semiconductor sputtering equipment.
The spare parts warehouse of the wafer fab equipment is reserved to ensure the continuous operation of the production line.
The supporting components for rotating target materials in physical vapor deposition processes.
ending
The AMAT 0190-13851 (Deublin 20212-200) rotary joint is a key component in the application material sputtering system that ensures the cooling of the rotating cathode and the transmission of the medium. Its sealing performance directly affects the stability of the sputtering process, and it is a component that needs special attention in equipment maintenance and spare parts procurement.
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