Edwards A71002909 干式涡旋真空泵 PDF资料
Edwards A71002909 是爱德华 ESDP-12 型号的一款干式涡旋真空泵,属于 nXDS 系列产品,以提供完全无油的清洁真空为主要特点。
产品特点
完全无油运行,提供洁净真空,避免油蒸气对工艺的污染。
属于 nXDS 系列干式涡旋泵,具有低噪音和长维护间隔的特点。
采用紧凑轻量化设计,便于设备集成安装。
配备入口单向阀,防止泵内回流污染工艺腔室。
该型号在二手市场多以全新或翻新状态流通。
产品参数
品牌:爱德华(Edwards)。
型号:A71002909,对应泵型 ESDP-12。
类型:干式涡旋真空泵。
系列:属于 nXDS 系列干式涡旋泵产品线。
应用领域
半导体制造中的光刻、刻蚀、沉积和清洗等工艺抽气。
平板显示制造中的蒸发、刻蚀和薄膜制备工艺。
太阳能电池制造中的 PECVD 和晶体生长工艺。
分析仪器如扫描电镜、质谱仪等的真空系统配套。
制药行业中的冷冻干燥、真空转移以及科研实验室的真空应用。
结尾
Edwards A71002909(ESDP-12)干式涡旋真空泵以无油洁净和运行稳定的特点,在半导体及各类需要清洁真空的领域中具有重要的配套价值,是设备选型和维护中值得关注的真空解决方案。
Edwards A71002909 干式涡旋真空泵 英文介绍
Edwards A71002909 is a dry vortex vacuum pump of the Edwards ESDP-12 model, belonging to the nXDS series products, characterized by providing completely oil-free clean vacuum.
Product Features
Completely oil-free operation, providing clean vacuum to avoid contamination of the process by oil vapor.
Belonging to the nXDS series dry vortex pump, it has the characteristics of low noise and long maintenance intervals.
Adopting a compact and lightweight design, it is easy to integrate and install equipment.
Equipped with an inlet one-way valve to prevent backflow and contamination of the process chamber inside the pump.
This model is often circulated in the second-hand market in a brand new or refurbished state.
Product Parameters
Brand: Edwards.
Model: A71002909, corresponding to pump type ESDP-12.
Type: Dry vortex vacuum pump.
Series: Belongs to the nXDS series dry vortex pump product line.
Application Areas
Vacuum pumping in processes such as photolithography, etching, deposition, and cleaning in semiconductor manufacturing.
Evaporation, etching, and thin film preparation processes in flat panel display manufacturing.
PECVD and crystal growth processes in solar cell manufacturing.
Vacuum system matching for analytical instruments such as scanning electron microscopy, mass spectrometer, etc.
Freeze drying, vacuum transfer, and vacuum applications in the pharmaceutical industry and research laboratories.
ending
The Edwards A71002909 (ESDP-12) dry vortex vacuum pump has important supporting value in semiconductor and various fields that require clean vacuum due to its oil-free, clean and stable operation characteristics. It is a vacuum solution worth paying attention to in equipment selection and maintenance.
Edwards A71002909 干式涡旋真空泵 产品图片

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